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施郁嫻
Overview
Works: | 0 works in 1 publications in 1 languages |
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Titles
(1)底層材料與光阻在下世代微影13.5 nm光區的離子釋氣研究 (2)Al2O3/SiO2中孔材料的製備與特性研究 = (1) Ionic outgassing from underlayer materials and photoresist upon irradiation at 13.5 nm (2) Preparation and characterization of Al2O3-modified SiO2 mesoporous materials
by:
國立高雄大學應用化學系碩士班; 施郁嫻
(Language materials, printed)
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