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林虹妙
Overview
Works: | 1 works in 1 publications in 1 languages |
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Titles
(1) 光阻經 DUV、VUV、EUV 及 BEUV 光源照射之釋氣定性與定量研究 (2) 含苯環有機化合物在8-150 eV 的電子游離與光游離之離子產物絕對分支比 = (1) Qualitative and quantitative outgassing from photoresist films upon DUV, VUV, EUV and BEUV irradiation(2) Absolute ionization branching ratios of aromatic compounds by electron ionization and photoionizationin the 8-150 eV range
by:
國立高雄大學應用化學系碩士班; 林虹妙
(Language materials, printed)
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Subjects