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廖珮淳
Overview
Works:
1 works in 1 publications in 1 languages
Titles
以AIN/Si3N4/Si結構製作第四代通訊用表面聲波元件 = Design and fabrication of 4G SAW device with AIN/Si3N4/Sistructure
by: 國立中山大學電機工程學系; 廖珮淳
(Language materials, printed)
, [撰]
Subjects
氮化鋁薄膜
AIN films
Processing
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