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Chemical vapor deposition :thermal a...

Sivaram, S.

Chemical vapor deposition :thermal and plasma deposition of electronic materials /

紀錄類型:	書目-語言資料,印刷品 : Monograph/item
正題名/作者:	Chemical vapor deposition :S. Sivaram.
其他題名:	thermal and plasma deposition of electronic materials /
作者:	Sivaram, S.
出版者:	New York :Van Nostrand Reinhold,c1995.
面頁冊數:	xii, 292 p. :ill. ;24 cm.
標題:	Microelectronics industry.
ISBN:	0442010796 :

Chemical vapor deposition :thermal and plasma deposition of electronic materials /
Sivaram, S.

Chemical vapor deposition :thermal and plasma deposition of electronic materials /S. Sivaram. - New York :Van Nostrand Reinhold,c1995. - xii, 292 p. :ill. ;24 cm.

Includes bibliographical references and index.

ISBN: 0442010796 :NT$3,998

LCCN: 94039696 Subjects--Topical Terms:

184281
Microelectronics industry.

LC Class. No.: TK7836 / S624 1995

Dewey Class. No.: 621.3815/2

Chemical vapor deposition :thermal and plasma deposition of electronic materials /
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245 1 0 $a Chemical vapor deposition : $b thermal and plasma deposition of electronic materials / $c S. Sivaram.
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300 $a xii, 292 p. : $b ill. ; $c 24 cm.
504 $a Includes bibliographical references and index.
650 $a Microelectronics industry. $3 184281
650 $a Chemical vapor deposition. $3 184282
650 $a Microelectronics $x Materials. $3 184283