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The effect of porosity and the pore templating process on adhesion of nanoporous glass films

紀錄類型:	書目-電子資源 : Monograph/item
正題名/作者:	The effect of porosity and the pore templating process on adhesion of nanoporous glass films
作者:	Maidenberg, Daniel A.
面頁冊數:	128 p.
附註:	Adviser: Reinhold H. Dauskardt.
附註:	Source: Dissertation Abstracts International, Volume: 65-04, Section: B, page: 2045.
Contained By:	Dissertation Abstracts International65-04B.
標題:	Engineering, Materials Science.
電子資源:	http://pqdd.sinica.edu.tw/twdaoapp/servlet/advanced?query=3128428
ISBN:	0496756907

The effect of porosity and the pore templating process on adhesion of nanoporous glass films
Maidenberg, Daniel A.

The effect of porosity and the pore templating process on adhesion of nanoporous glass films [electronic resource] - 128 p.

Adviser: Reinhold H. Dauskardt.

Thesis (Ph.D.)--Stanford University, 2004.

At the top of the glass film, adhesion behavior was found to be insensitive to porosity, approximately 2.5 J/m2 for all specimens, from 0 to 50% porosity. This was shown to be caused by a pore-free depletion zone that forms in the top 5--10 nm of the nanoporous glass. These local density fluctuations were examined using specular x-ray reflectivity, and were shown to vary depending on the porogen system.

ISBN: 0496756907Subjects--Topical Terms:

226940
Engineering, Materials Science.

The effect of porosity and the pore templating process on adhesion of nanoporous glass films
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520 # $a At the top of the glass film, adhesion behavior was found to be insensitive to porosity, approximately 2.5 J/m2 for all specimens, from 0 to 50% porosity. This was shown to be caused by a pore-free depletion zone that forms in the top 5--10 nm of the nanoporous glass. These local density fluctuations were examined using specular x-ray reflectivity, and were shown to vary depending on the porogen system.
520 # $a In nanoporous systems with high porogen efficiency, i.e. the ratio of pore volume in the cured film to the fraction of porogen in the precursor solution, the adhesion was found to decrease monotonically with increasing porosity, as expected. However, in porogen systems with reduced efficiency, anomalous adhesion behavior was measured at both the free surface (subsequently capped) and the substrate interface.
520 # $a Remarkable toughening behavior was demonstrated at the substrate interface, with adhesion energies steeply rising with increasing porosity to over 20 J/m2 at 50%. This toughening effect was activated by residual porogen molecules functioning as molecular bridging elements across the substrate-glass interface. Classical bridging models were adapted to the molecular length scale and were successfully utilized to predict the increased adhesion.
520 # $a The fabrication of thin films with controlled, nanometer-scale porosity has been studied for a variety of engineering solutions, from low-k dielectric films to biological sensor applications. The introduction of nanopores into these films, especially the silica-based glasses which are the most common matrix materials, will have profound effects on their mechanical properties. The principal objective of this study is to investigate the adhesive behavior of nanoporous glasses and the effects of nanoporosity, the pore-creating process, and the interaction of the matrix materials with the sacrificial pore-generating molecules (porogens). The distribution and architecture of the pores and residue from the porogen molecules were found to significantly alter the adhesion energies at selected interfaces.
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