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High frequency integrated inductors ...

Crawford, Ankur Mohan.

High frequency integrated inductors with magnetic materials.

紀錄類型:	書目-電子資源 : Monograph/item
正題名/作者:	High frequency integrated inductors with magnetic materials.
作者:	Crawford, Ankur Mohan.
面頁冊數:	144 p.
附註:	Adviser: Shan X. Wang.
附註:	Source: Dissertation Abstracts International, Volume: 65-09, Section: B, page: 4771.
Contained By:	Dissertation Abstracts International65-09B.
標題:	Engineering, Materials Science.
電子資源:	http://pqdd.sinica.edu.tw/twdaoapp/servlet/advanced?query=3145494
ISBN:	0496043994

High frequency integrated inductors with magnetic materials.
Crawford, Ankur Mohan.

High frequency integrated inductors with magnetic materials. - 144 p.

Adviser: Shan X. Wang.

Thesis (Ph.D.)--Stanford University, 2004.

Integration of inductors has been driven by the need for increased component density and reduction of costs. This has driven a significant research effort in integrating magnetic materials with the inductor to increase inductance and scale down area. Much of this research has focused on processes that are not applicable to the semiconductor industry; effectively excluding them from the advances being made in the miniaturization of components using magnetic materials. Our goal was to fabricate inductors with a CMOS compatible magnetic material using a silicon processing tool-set in order to make the recent advances in integration of inductors applicable to silicon processors, while simultaneously scaling the component.

ISBN: 0496043994Subjects--Topical Terms:

226940
Engineering, Materials Science.

High frequency integrated inductors with magnetic materials.
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245 1 0 $a High frequency integrated inductors with magnetic materials.
300 $a 144 p.
500 $a Adviser: Shan X. Wang.
500 $a Source: Dissertation Abstracts International, Volume: 65-09, Section: B, page: 4771.
502 $a Thesis (Ph.D.)--Stanford University, 2004.
520 # $a Integration of inductors has been driven by the need for increased component density and reduction of costs. This has driven a significant research effort in integrating magnetic materials with the inductor to increase inductance and scale down area. Much of this research has focused on processes that are not applicable to the semiconductor industry; effectively excluding them from the advances being made in the miniaturization of components using magnetic materials. Our goal was to fabricate inductors with a CMOS compatible magnetic material using a silicon processing tool-set in order to make the recent advances in integration of inductors applicable to silicon processors, while simultaneously scaling the component.
520 # $a To understand this altered high frequency response of the magnetic material, when patterned, stand alone patterns were fabricated and a dramatic increase in the dynamic response of the magnetic material was measured, as was observed in the inductors. With the aide of Kerr microscopy studies coupled with high frequency permeability measurements this behavior is attributed to the formation of closure domains. We found that the magnetic losses at high frequencies (2 GHz) can be so severe that the advantage in inductance gained by using the magnetic film is quickly deteriorated. Solutions to improving Q while simultaneously keeping the most efficient eddy current inhibiting pattern will be discussed.
520 # $a We have fabricated CMOS integrated inductors with magnetic shields and have measured an increase of 60% in inductance when a single layer of magnetic material is used, and 100% when the inductor is sandwiched between two solid magnetic layers. Additionally, a patterned shield configuration was used to minimize high frequency electrical losses, for e.g., eddy currents. The results revealed that by patterning the ground plane, in addition to the partial inhibition of eddy currents, there was an unexpected increased frequency response of the magnetic material. Furthermore, analytical models applied to these inductors revealed that the in-situ magnetic properties are much different than expected.
520 # $a With a better understanding of the magnetic material and its behavior at high frequencies, new inductors have been designed and modeled for power delivery applications.
590 $a School code: 0212.
650 # 0 $a Engineering, Materials Science. $3 226940
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773 0 # $g 65-09B. $t Dissertation Abstracts International
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790 1 0 $a Wang, Shan X., $e advisor
791 $a Ph.D.
792 $a 2004
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