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Precursor chemistry of advanced mate...

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Fischer, Roland A.

Precursor chemistry of advanced materials :CVD, ALD and nanoparticles /

紀錄類型:	書目-語言資料,印刷品 : Monograph/item
正題名/作者:	Precursor chemistry of advanced materials :volume editor: Roland A. Fischer ; with contributions by M.D. Allendorf ... [et al.].
其他題名:	CVD, ALD and nanoparticles /
其他作者:	Fischer, Roland A.
出版者:	Berlin :Springer,c2005.
面頁冊數:	xv, 213 p. :ill. ;25 cm.
叢書名:	Topics in organometallic chemistry,
標題:	Metal organic chemical vapor deposition.
電子資源:	http://www.loc.gov/catdir/enhancements/fy0662/2005928963-d.html
ISBN:	9783540016052

Precursor chemistry of advanced materials :CVD, ALD and nanoparticles /
Precursor chemistry of advanced materials :CVD, ALD and nanoparticles /volume editor: Roland A. Fischer ; with contributions by M.D. Allendorf ... [et al.]. - Berlin :Springer,c2005. - xv, 213 p. :ill. ;25 cm. - Topics in organometallic chemistry,91436-6002 ;.

Includes bibliographical references and index.

ISBN: 9783540016052

LCCN: 2005928963

Nat. Bib. No.: GBA589495bnbSubjects--Topical Terms:

249005
Metal organic chemical vapor deposition.

LC Class. No.: QD411.7.S94 / P74 2005

Dewey Class. No.: 547.05

Precursor chemistry of advanced materials :CVD, ALD and nanoparticles /
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245 0 0 $a Precursor chemistry of advanced materials : $b CVD, ALD and nanoparticles / $c volume editor: Roland A. Fischer ; with contributions by M.D. Allendorf ... [et al.].
260 $a Berlin : $c c2005. $b Springer,
300 $a xv, 213 p. : $b ill. ; $c 25 cm.
440 0 $a Topics in organometallic chemistry, $v 9 $x 1436-6002 ;
504 $a Includes bibliographical references and index.
650 $a Metal organic chemical vapor deposition. $3 249005
650 $a Chemical vapor deposition. $3 184282
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700 $a Fischer, Roland A. $3 249004
856 4 2 $3 Publisher description $u http://www.loc.gov/catdir/enhancements/fy0662/2005928963-d.html $z http://www.loc.gov/catdir/enhancements/fy0662/2005928963-d.html

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