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Micro process engineering :fundament...

Kockmann, Norbert.

Micro process engineering :fundamentals, devices, fabrication, and applications /

紀錄類型:	書目-語言資料,印刷品 : Monograph/item
正題名/作者:	Micro process engineering :volume editor, Norbert Kockmann.
其他題名:	fundamentals, devices, fabrication, and applications /
其他作者:	Kockmann, Norbert.
出版者:	Weinheim :Wiley-VCH ,c2006.
面頁冊數:	xxii, 507 p. :ill. ;25 cm.
叢書名:	Advanced micro & nanosystems ;
標題:	Microtechnology.
ISBN:	9783527312467

Micro process engineering :fundamentals, devices, fabrication, and applications /
Micro process engineering :fundamentals, devices, fabrication, and applications /volume editor, Norbert Kockmann. - Weinheim :Wiley-VCH ,c2006. - xxii, 507 p. :ill. ;25 cm. - Advanced micro & nanosystems ;v. 5.

Includes bibliographical references and index.

ISBN: 9783527312467

LCCN: 2006296404

Nat. Bib. No.: GBA595500bnbSubjects--Topical Terms:

258003
Microtechnology.

LC Class. No.: TS183 / .M52 2006

Dewey Class. No.: 670.42

Micro process engineering :fundamentals, devices, fabrication, and applications /
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