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Microelectronic applications of chem...
~
Li, Yuzhuo.
Microelectronic applications of chemical mechanical planarization /
紀錄類型:
書目-語言資料,印刷品 : Monograph/item
正題名/作者:
Microelectronic applications of chemical mechanical planarization /edited by Yuzhuo Li.
其他作者:
Li, Yuzhuo.
出版者:
Hoboken, N.J. :John Wiley,c2008.
面頁冊數:
xxv, 734 p. :ill. ;25 cm.
附註:
"Wiley Interscience."
標題:
Integrated circuitsDesign and construction.
電子資源:
http://www.loc.gov/catdir/toc/ecip0715/2007015557.html
電子資源:
http://www.loc.gov/catdir/enhancements/fy0742/2007015557-b.html
電子資源:
http://www.loc.gov/catdir/enhancements/fy0740/2007015557-d.html
ISBN:
9780471719199 :
Microelectronic applications of chemical mechanical planarization /
Microelectronic applications of chemical mechanical planarization /
edited by Yuzhuo Li. - Hoboken, N.J. :John Wiley,c2008. - xxv, 734 p. :ill. ;25 cm.
"Wiley Interscience."
Includes bibliographical references and index.
ISBN: 9780471719199 :NT$3784
LCCN: 2007015557Subjects--Topical Terms:
184690
Integrated circuits
--Design and construction.
LC Class. No.: TK7874 / .M4675 2007
Dewey Class. No.: 621.3815
Microelectronic applications of chemical mechanical planarization /
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http://www.loc.gov/catdir/toc/ecip0715/2007015557.html
http://www.loc.gov/catdir/enhancements/fy0742/2007015557-b.html
http://www.loc.gov/catdir/enhancements/fy0740/2007015557-d.html
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