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Scaling issues and design of MEMS /

~

Baglio, S.

Scaling issues and design of MEMS /

紀錄類型:	書目-語言資料,印刷品 : Monograph/item
正題名/作者:	Scaling issues and design of MEMS /Salvatore Baglio, Salvatore Castorina, Nicolo Savalli.
其他題名:	Scaling issues and design of microelectromechanical systems
作者:	Baglio, S.
其他作者:	Savalli, Nicol.
出版者:	Chichester, West Sussex, England ;John Wiley & Sons,c2007.
面頁冊數:	xiii, 229 p. :ill. ;24 cm.
標題:	Microelectromechanical systemsDesign and construction.
ISBN:	9780470016992

Scaling issues and design of MEMS /
Baglio, S.

Scaling issues and design of MEMS /Scaling issues and design of microelectromechanical systemsSalvatore Baglio, Salvatore Castorina, Nicolo Savalli. - Chichester, West Sussex, England ;John Wiley & Sons,c2007. - xiii, 229 p. :ill. ;24 cm.

Includes bibliographical references and index.

ISBN: 9780470016992

LCCN: 2007037324Subjects--Topical Terms:

206811
Microelectromechanical systems
--Design and construction.

LC Class. No.: TK7875 / .B34 2007

Dewey Class. No.: 620/.5

Scaling issues and design of MEMS /
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050 0 0 $a TK7875 $b .B34 2007
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245 1 0 $a Scaling issues and design of MEMS / $c Salvatore Baglio, Salvatore Castorina, Nicolo Savalli.
246 3 $a Scaling issues and design of microelectromechanical systems
260 $a Chichester, West Sussex, England ; $a Hoboken, NJ : $c c2007. $b John Wiley & Sons,
300 $a xiii, 229 p. : $b ill. ; $c 24 cm.
504 $a Includes bibliographical references and index.
650 $a Microelectromechanical systems $x Design and construction. $3 206811
700 $a Savalli, Nicol. $3 282971
700 $a Castorina, Salvatore. $3 282970

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