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Low pressure plasmas and microstruct...

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Franz, Gerhard.

Low pressure plasmas and microstructuring technology

紀錄類型:	書目-電子資源 : Monograph/item
正題名/作者:	Low pressure plasmas and microstructuring technologyby Gerhard Franz.
作者:	Franz, Gerhard.
出版者:	Berlin, Heidelberg :Springer-Verlag Berlin Heidelberg,2009.
面頁冊數:	xxiv, 732 p. :ill., digital ;24 cm.
Contained By:	Springer eBooks
標題:	Electronics and Microelectronics, Instrumentation.
電子資源:	http://libsw.nuk.edu.tw:81/login?url=http://dx.doi.org/10.1007/978-3-540-85849-2
ISBN:	9783540858492 (electronic bk.)

Low pressure plasmas and microstructuring technology
Franz, Gerhard.

Low pressure plasmas and microstructuring technology[electronic resource] /by Gerhard Franz. - Berlin, Heidelberg :Springer-Verlag Berlin Heidelberg,2009. - xxiv, 732 p. :ill., digital ;24 cm.

ISBN: 9783540858492 (electronic bk.)Subjects--Topical Terms:

274412
Electronics and Microelectronics, Instrumentation.

LC Class. No.: TA2020 / .F73 2009

Dewey Class. No.: 621.044

Low pressure plasmas and microstructuring technology
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020 $a 9783540858485 (paper)
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100 1 $a Franz, Gerhard. $3 348198
245 1 0 $a Low pressure plasmas and microstructuring technology $h [electronic resource] / $c by Gerhard Franz.
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300 $a xxiv, 732 p. : $b ill., digital ; $c 24 cm.
650 2 4 $a Electronics and Microelectronics, Instrumentation. $3 274412
650 2 4 $a Atomic and Molecular Structure and Spectra. $3 275996
650 2 4 $a Surfaces and Interfaces, Thin Films. $3 274441
650 # 0 $a Plasma (Ionized gases) $x Industrial applications. $3 348199
650 # 0 $a Plasma engineering. $3 282445
650 # 0 $a Plasma etching. $3 225107
650 2 4 $a Optical and Electronic Materials. $3 274099
650 1 4 $a Material Science. $3 308679
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950 $a Chemistry and Materials Science (Springer-11644)

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