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微型干涉儀光積體元件之光輸出特性數值模擬分析研究 = The Study...

國立高雄大學電機工程學系--先進電子構裝技術產業研發碩士專班

微型干涉儀光積體元件之光輸出特性數值模擬分析研究 = The Study of Numerical Simulations of the Integrated Micro-Interferometer Device and its Output Characterizations

紀錄類型:	書目-語言資料,印刷品 : 單行本
並列題名:	The Study of Numerical Simulations of the Integrated Micro-Interferometer Device and its Output Characterizations
作者:	譚嘉偉,
其他團體作者:	國立高雄大學
出版地:	[高雄市]
出版者:	撰者;
出版年:	民99[2010]
面頁冊數:	69面圖，表 : 30公分;
標題:	脊狀波導結構
標題:	Ridge-waveguide structure
電子資源:	http://handle.ncl.edu.tw/11296/ndltd/00650467232898049118
摘要註:	本論文主要探討微型干涉儀光積體元件之光輸出特性，運用金屬氧化半導體（Metal-Insulator-Semiconductor）元件的理論，設計脊狀波導結構Mach Zehnder微型干涉儀的元件，利用具有高折射率的矽材料，藉由MIS結構的矽半導體材料自由載子的產生來調變其折射率的變化，控制光信號的On及Off的特性，形成良好的光電調制開關，利用氮化鋁(Aln)做為絶緣層(insulating layer)的材料，以矽材料做為導光層（waveguide layer），再以空氣（Air）做為基板層（background layer），使用波導基本理論(模態傳播法)、金屬氧化半導體（Metal-Insulator-Semiconductor）元件的理論與模擬軟體(BeamProp Software)來設計光波導元件，模擬Mach Zehnder微型干涉儀光積體元件光的輸出特性。 In this thesis, we demonstrate an optical micro interferometer and its optical output characterizations. using numerical approach of a beam propagation along a silicon base waveguide , and the control of the surface potential in a metal-insulator-semiconductor structure, we show that the optical signal of a Mach-Zehnder interferometer can be modulated by applying bias and each arms which constructed by a MIS structure,variation of the electrons and holes concentration at the interface between insulating layer and semiconductor substrate is due to the change inversion by applying position bias on a p-type substrate , that can effectively change the index of refraction of the waveguide of each arms of the Mach-Zehnder interferometer. We show that the optical resigned modulation can be achieved with high speed response, and matched to the trend of silicon photonics technology.

微型干涉儀光積體元件之光輸出特性數值模擬分析研究 = The Study of Numerical Simulations of the Integrated Micro-Interferometer Device and its Output Characterizations
譚, 嘉偉

微型干涉儀光積體元件之光輸出特性數值模擬分析研究 = The Study of Numerical Simulations of the Integrated Micro-Interferometer Device and its Output Characterizations / 譚嘉偉撰 - [高雄市] : 撰者, 民99[2010]. - 69面 ; 圖，表 ; 30公分.
參考書目：面.
脊狀波導結構Ridge-waveguide structure

微型干涉儀光積體元件之光輸出特性數值模擬分析研究 = The Study of Numerical Simulations of the Integrated Micro-Interferometer Device and its Output Characterizations
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330 $a 本論文主要探討微型干涉儀光積體元件之光輸出特性，運用金屬氧化半導體（Metal-Insulator-Semiconductor）元件的理論，設計脊狀波導結構Mach Zehnder微型干涉儀的元件，利用具有高折射率的矽材料，藉由MIS結構的矽半導體材料自由載子的產生來調變其折射率的變化，控制光信號的On及Off的特性，形成良好的光電調制開關，利用氮化鋁(Aln)做為絶緣層(insulating layer)的材料，以矽材料做為導光層（waveguide layer），再以空氣（Air）做為基板層（background layer），使用波導基本理論(模態傳播法)、金屬氧化半導體（Metal-Insulator-Semiconductor）元件的理論與模擬軟體(BeamProp Software)來設計光波導元件，模擬Mach Zehnder微型干涉儀光積體元件光的輸出特性。 In this thesis, we demonstrate an optical micro interferometer and its optical output characterizations. using numerical approach of a beam propagation along a silicon base waveguide , and the control of the surface potential in a metal-insulator-semiconductor structure, we show that the optical signal of a Mach-Zehnder interferometer can be modulated by applying bias and each arms which constructed by a MIS structure,variation of the electrons and holes concentration at the interface between insulating layer and semiconductor substrate is due to the change inversion by applying position bias on a p-type substrate , that can effectively change the index of refraction of the waveguide of each arms of the Mach-Zehnder interferometer. We show that the optical resigned modulation can be achieved with high speed response, and matched to the trend of silicon photonics technology.
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