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Introduction to microsystem design

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Schomburg, Werner Karl.

Introduction to microsystem design

紀錄類型:	書目-電子資源 : Monograph/item
正題名/作者:	Introduction to microsystem designby Werner Karl Schomburg.
作者:	Schomburg, Werner Karl.
出版者:	Berlin, Heidelberg :Springer-Verlag Berlin Heidelberg,2011.
面頁冊數:	xxi, 319 p. :ill., digital ;24 cm.
叢書名:	RWTHedition,
Contained By:	Springer eBooks
標題:	Microelectromechanical systemsDesign and construction.
電子資源:	http://dx.doi.org/10.1007/978-3-642-19489-4
ISBN:	9783642194894 (electronic bk.)

Introduction to microsystem design
Schomburg, Werner Karl.

Introduction to microsystem design[electronic resource] /by Werner Karl Schomburg. - Berlin, Heidelberg :Springer-Verlag Berlin Heidelberg,2011. - xxi, 319 p. :ill., digital ;24 cm. - RWTHedition,1865-0899.

ISBN: 9783642194894 (electronic bk.)Subjects--Topical Terms:

206811
Microelectromechanical systems
--Design and construction.

LC Class. No.: TK7875 / .S36 2011

Dewey Class. No.: 621.381

Introduction to microsystem design
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020 $a 9783642194887 (paper)
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300 $a xxi, 319 p. : $b ill., digital ; $c 24 cm.
440 0 $a RWTHedition, $x 1865-0899
650 0 $a Microelectromechanical systems $x Design and construction. $3 206811
650 1 4 $a Engineering. $3 210888
650 2 4 $a Nanotechnology and Microengineering. $3 348421
650 2 4 $a Optical and Electronic Materials. $3 274099
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