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Introduction to microlithography /
~
Bowden, M. J., (1943-)
Introduction to microlithography /
紀錄類型:
書目-語言資料,印刷品 : Monograph/item
正題名/作者:
Introduction to microlithography /edited by Larry F. Thompson, C. Grant Willson, Murrae J. Bowden.
其他作者:
Thompson, L. F.,
出版者:
Washington, DC :American Chemical Society,1994.
面頁冊數:
xiv, 527 p. :ill. ;24 cm.
標題:
MicrolithographyCongresses.
電子資源:
http://www.loc.gov/catdir/enhancements/fy0605/93042023-d.html
電子資源:
http://www.loc.gov/catdir/enhancements/fy0605/93042023-t.html
ISBN:
9780841228481 (alk. paper) :
Introduction to microlithography /
Introduction to microlithography /
edited by Larry F. Thompson, C. Grant Willson, Murrae J. Bowden. - 2nd ed. - Washington, DC :American Chemical Society,1994. - xiv, 527 p. :ill. ;24 cm. - ACS professional reference book.
Includes bibliographical references and index.
An introduction to lithography / Larry F. Thompson -- The lithographic process / Murrae J. Bowden -- Organic resist materials / C. Grant Willson -- Resist processing / Larry Thompson -- Plasma etching / J.A. Mucha, D.W. Hess, and E.S. Aydil.
ISBN: 9780841228481 (alk. paper) :NT$3550
LCCN: 93042023 Subjects--Topical Terms:
546317
Microlithography
--Congresses.
LC Class. No.: TR940 / I61 1994
Dewey Class. No.: 621.3815/31
Introduction to microlithography /
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