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Handbook of thin film depositiontech...

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Seshan, Krishna.

Handbook of thin film depositiontechniques, processes, and technologies /

紀錄類型:	書目-電子資源 : Monograph/item
正題名/作者:	Handbook of thin film depositionedited by Krishna Seshan.
其他題名:	techniques, processes, and technologies /
其他作者:	Seshan, Krishna.
出版者:	Amsterdam ;Elsevier ;2012.
面頁冊數:	xviii, 392 p. :ill. ;24 cm.
標題:	Thin films.
電子資源:	http://www.sciencedirect.com/science/book/9781437778731
ISBN:	9781437778731 (electronic bk.)

Handbook of thin film depositiontechniques, processes, and technologies /
Handbook of thin film depositiontechniques, processes, and technologies /[electronic resource] :edited by Krishna Seshan. - 3rd ed. - Amsterdam ;Elsevier ;2012. - xviii, 392 p. :ill. ;24 cm.

Includes bibliographical references and index.

ISBN: 9781437778731 (electronic bk.)

LCCN: 2012472459Subjects--Topical Terms:

203678
Thin films.

LC Class. No.: TK7872.T55 / H36 2012

Dewey Class. No.: 621.38152

Handbook of thin film depositiontechniques, processes, and technologies /
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