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Thin film materials technologysputte...

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Adachi, Hideaki.

Thin film materials technologysputtering of compound materials /

紀錄類型:	書目-電子資源 : Monograph/item
正題名/作者:	Thin film materials technologyby Kiyotaka Wasa, Makoto Kitabatake, Hideaki Adachi.
其他題名:	sputtering of compound materials /
作者:	Wasa, Kiyotaka.
其他作者:	Kitabatake, Makoto.
出版者:	Norwich, NY :William Andrew Pub. ;c2004.
面頁冊數:	xiv, 518 p. :ill. ;24 cm.
標題:	Cathode sputtering (Plating process)
電子資源:	http://www.sciencedirect.com/science/book/9780815514831
ISBN:	9780815514831 (electronic bk.)

Thin film materials technologysputtering of compound materials /
Wasa, Kiyotaka.

Thin film materials technologysputtering of compound materials /[electronic resource] :by Kiyotaka Wasa, Makoto Kitabatake, Hideaki Adachi. - Norwich, NY :William Andrew Pub. ;c2004. - xiv, 518 p. :ill. ;24 cm.

Includes bibliographical references and index.

ISBN: 9780815514831 (electronic bk.)

LCCN: 2003018016Subjects--Topical Terms:

283845
Cathode sputtering (Plating process)

LC Class. No.: TS695 / .W38 2004

Dewey Class. No.: 621.3815/2

Thin film materials technologysputtering of compound materials /
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245 1 0 $a Thin film materials technology $h [electronic resource] : $b sputtering of compound materials / $c by Kiyotaka Wasa, Makoto Kitabatake, Hideaki Adachi.
260 $a Norwich, NY : $b William Andrew Pub. ; $a Heidelberg : $b Springer, $c c2004.
300 $a xiv, 518 p. : $b ill. ; $c 24 cm.
504 $a Includes bibliographical references and index.
650 0 $a Cathode sputtering (Plating process) $3 283845
650 0 $a Thin films. $3 203678
700 1 $a Kitabatake, Makoto. $3 646659
700 1 $a Adachi, Hideaki. $3 646660
856 4 0 $u http://www.sciencedirect.com/science/book/9780815514831

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