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Nanofabrication handbook

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Cabrini, Stefano.

Nanofabrication handbook

紀錄類型:	書目-電子資源 : Monograph/item
正題名/作者:	Nanofabrication handbookedited by Stefano Cabrini, Satoshi Kawata.
其他作者:	Cabrini, Stefano.
出版者:	Boca Raton, FL :CRC Press,c2012.
面頁冊數:	1 online resource (xv, 518 p.) :ill.
標題:	Nanostructured materialsCongresses.
電子資源:	http://www.crcnetbase.com/isbn/9781420090536
ISBN:	9781420090536$q(electronic bk.)

Nanofabrication handbook
Nanofabrication handbook[electronic resource] /edited by Stefano Cabrini, Satoshi Kawata. - Boca Raton, FL :CRC Press,c2012. - 1 online resource (xv, 518 p.) :ill.

Includes bibliographical references and index.

pt. 1. Standard lithography -- pt. 2. New lithographic techniques -- pt. 3. Nanofabrication applications.

ISBN: 9781420090536$q(electronic bk.)Subjects--Topical Terms:

438612
Nanostructured materials
--Congresses.Index Terms--Genre/Form:

214472
Electronic books.

LC Class. No.: TA418.9.N35 / N2523 2012eb

Dewey Class. No.: 620.1/15

Nanofabrication handbook
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020 $a 9781420090536$q(electronic bk.)
020 $a 1420090534$q(electronic bk.)
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020 $z 1420090526
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050 4 $a TA418.9.N35 $b N2523 2012eb
082 0 4 $a 620.1/15 $2 23
245 0 0 $a Nanofabrication handbook $h [electronic resource] / $c edited by Stefano Cabrini, Satoshi Kawata.
260 $a Boca Raton, FL : $b CRC Press, $c c2012.
300 $a 1 online resource (xv, 518 p.) : $b ill.
504 $a Includes bibliographical references and index.
505 0 $a pt. 1. Standard lithography -- pt. 2. New lithographic techniques -- pt. 3. Nanofabrication applications.
588 0 $a Print version record.
650 0 $a Nanostructured materials $v Congresses. $3 438612
650 0 $a Nanostructures $v Congresses. $3 438624
655 0 $a Electronic books. $2 local. $3 214472
700 1 $a Cabrini, Stefano. $3 716917
700 1 $a Kawata, Satoshi, $d 1966- $3 226339
856 4 0 $u http://www.crcnetbase.com/isbn/9781420090536

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