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Introduction to microsystem design

Schomburg, Werner Karl.

Introduction to microsystem design

紀錄類型:	書目-電子資源 : Monograph/item
正題名/作者:	Introduction to microsystem designby Werner Karl Schomburg.
作者:	Schomburg, Werner Karl.
出版者:	Berlin, Heidelberg :Springer Berlin Heidelberg :2015.
面頁冊數:	xxiv, 374 p. :ill., digital ;24 cm.
Contained By:	Springer eBooks
標題:	Microelectromechanical systemsDesign and construction.
電子資源:	http://dx.doi.org/10.1007/978-3-662-47023-7
ISBN:	9783662470237 (electronic bk.)

Introduction to microsystem design
Schomburg, Werner Karl.

Introduction to microsystem design[electronic resource] /by Werner Karl Schomburg. - 2nd ed. - Berlin, Heidelberg :Springer Berlin Heidelberg :2015. - xxiv, 374 p. :ill., digital ;24 cm. - RWTHedition,1865-0899. - RWTHedition..

Scaling Laws -- Elastic deformations -- Thin Films -- Conductor Paths -- Electrical Measurements -- Membranes -- Strain gauges on membranes -- Beams -- Vibrations -- Capillaries -- Capacitive forces -- Piezoelectric effect -- Thermal actuators -- Micro optics -- Diffusion -- Micro valves -- Micro pumps -- Micro dosing -- Analogies of physical domains -- Mechanical devices for electronics.

This book systematically describes the design options for micro systems as well as the equations needed for calculating the behavior of their basic elements. The fundamental equations needed to calculate the effects and forces that are important in micro systems are also provided. Readers do not require previous knowledge of fabrication processes. This second edition of the volume is a thoroughly revised and extended update. The target audience primarily comprises experts in the field of micro systems and the book is also suitable for graduate engineering students. For quick reference, equations are presented in tables that can be found in an index at the end of the book.

ISBN: 9783662470237 (electronic bk.)

Standard No.: 10.1007/978-3-662-47023-7doiSubjects--Topical Terms:

206811
Microelectromechanical systems
--Design and construction.

LC Class. No.: TK7875

Dewey Class. No.: 621.381

Introduction to microsystem design
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