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Nanopositioning technologiesfundamen...

Liu, Xinyu.

Nanopositioning technologiesfundamentals and applications /

紀錄類型:	書目-電子資源 : Monograph/item
正題名/作者:	Nanopositioning technologiesedited by Changhai Ru, Xinyu Liu, Yu Sun.
其他題名:	fundamentals and applications /
其他作者:	Ru, Changhai.
出版者:	Cham :Springer International Publishing :2016.
面頁冊數:	vi, 409 p. :ill., digital ;24 cm.
Contained By:	Springer eBooks
標題:	Nanoelectromechanical systems.
電子資源:	http://dx.doi.org/10.1007/978-3-319-23853-1
ISBN:	9783319238531$q(electronic bk.)

Nanopositioning technologiesfundamentals and applications /
Nanopositioning technologiesfundamentals and applications /[electronic resource] :edited by Changhai Ru, Xinyu Liu, Yu Sun. - Cham :Springer International Publishing :2016. - vi, 409 p. :ill., digital ;24 cm.

1.A review of Stick-Slip Nanopositioning Actuators -- 2. Piezoelectric Motor Technology - A Review -- 3.Design of High-speed Nanopositioning Systems -- 4.Parallel-Kinematic Nanopositioning Stages Based on Roberts Mechanism -- 5.Electro-magnetic Nano Positioning -- 6.Modeling of piezoelectric-actuated nanopositioning stages involving with the hysteresis -- 7. Tracking Control for Nanopositioning -- 8.Position Sensors for Nanopositioning -- 9. MEMS Nanopositioners -- 10.Control Issues of MEMS nanopositioning devices -- 11. A Review of Nanomanipulation in Scanning Electron Microscopes -- 12. Nanopositioning for lithography and data storage.

This book covers the state-of-the-art technologies for positioning with nanometer resolutions and accuracies, particularly those based on piezoelectric actuators and MEMS actuators. The latest advances are described, including the design of nanopositioning devices, sensing and actuation technologies, and control methods for nanopositioning. This is an ideal book for mechanical and electrical engineering students and researchers; micro and nanotechnology researchers and graduate students; as well as those working in the precision instrumentation or semiconductor industries.

ISBN: 9783319238531$q(electronic bk.)

Standard No.: 10.1007/978-3-319-23853-1doiSubjects--Topical Terms:

321655
Nanoelectromechanical systems.

LC Class. No.: TK7875

Dewey Class. No.: 620.5

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520 $a This book covers the state-of-the-art technologies for positioning with nanometer resolutions and accuracies, particularly those based on piezoelectric actuators and MEMS actuators. The latest advances are described, including the design of nanopositioning devices, sensing and actuation technologies, and control methods for nanopositioning. This is an ideal book for mechanical and electrical engineering students and researchers; micro and nanotechnology researchers and graduate students; as well as those working in the precision instrumentation or semiconductor industries.
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