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Nanolithographythe art of fabricatin...

Feldman, Martin,

Nanolithographythe art of fabricating nanoelectronic and nanophotonic devices and systems /

紀錄類型:	書目-電子資源 : Monograph/item
正題名/作者:	Nanolithographyedited by Martin Feldman.
其他題名:	the art of fabricating nanoelectronic and nanophotonic devices and systems /
其他作者:	Feldman, Martin,
出版者:	Oxford :Woodhead Publishing,2014.
面頁冊數:	1 online resource (xxiv, 573 p.) :ill.
標題:	Nanolithography.
電子資源:	click for full text
ISBN:	9780857095008 (electronic bk.)

Nanolithographythe art of fabricating nanoelectronic and nanophotonic devices and systems /
Nanolithographythe art of fabricating nanoelectronic and nanophotonic devices and systems /[electronic resource] :edited by Martin Feldman. - Oxford :Woodhead Publishing,2014. - 1 online resource (xxiv, 573 p.) :ill. - Woodhead Publishing series in electronic and optical materials ;no. 42. - Woodhead Publishing series in electronic and optical materials ;no. 41..

Includes bibliographical references and index.

ISBN: 9780857095008 (electronic bk.)Subjects--Topical Terms:

752431
Nanolithography.

LC Class. No.: TK7874.843 / .N368 2014

Dewey Class. No.: 621.381531

Nanolithographythe art of fabricating nanoelectronic and nanophotonic devices and systems /
LDR:00826nmm a2200205 a 4500 001 492433
006 m o d
007 cr cn|||||||||
008 170215s2014 enka ob 001 0 eng
020 $a 9780857095008 (electronic bk.)
035 $a 16001323
040 $a PCCU $b eng $c PCCU
041 0 $a eng
050 4 $a TK7874.843 $b .N368 2014
082 0 $a 621.381531
245 0 0 $a Nanolithography $h [electronic resource] : $b the art of fabricating nanoelectronic and nanophotonic devices and systems / $c edited by Martin Feldman.
260 $a Oxford : $b Woodhead Publishing, $c 2014.
300 $a 1 online resource (xxiv, 573 p.) : $b ill.
490 1 $a Woodhead Publishing series in electronic and optical materials ; $v no. 42
504 $a Includes bibliographical references and index.
650 0 $a Nanolithography. $3 752431
700 1 $a Feldman, Martin, $e editor of compilation. $3 752430
830 0 $a Woodhead Publishing series in electronic and optical materials ; $v no. 41. $3 619284
856 4 0 $u http://www.sciencedirect.com/science/book/9780857095008 $z click for full text