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Resonant MEMSfundamentals, implement...

Brand, Oliver.

Resonant MEMSfundamentals, implementation and application /

紀錄類型:	書目-電子資源 : Monograph/item
正題名/作者:	Resonant MEMSedited by Oliver Brand ... [et al.].
其他題名:	fundamentals, implementation and application /
其他作者:	Brand, Oliver.
出版者:	Wiesbaden :John Wiley and Sons,c2015.
面頁冊數:	1 online resource :ill.
標題:	Microelectromechanical systemsDesign and construction.
電子資源:	http://onlinelibrary.wiley.com/book/10.1002/9783527676330
ISBN:	9783527676330 (electronic bk.)

Resonant MEMSfundamentals, implementation and application /
Resonant MEMSfundamentals, implementation and application /[electronic resource] :edited by Oliver Brand ... [et al.]. - 1st ed. - Wiesbaden :John Wiley and Sons,c2015. - 1 online resource :ill. - Advanced micro and nanosystems. - Advanced micro & nanosystems..

Includes bibliographical references and index.

ISBN: 9783527676330 (electronic bk.)Subjects--Topical Terms:

206811
Microelectromechanical systems
--Design and construction.

LC Class. No.: TK7875

Dewey Class. No.: 621.381

Resonant MEMSfundamentals, implementation and application /
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