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Nano-lithography

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Landis, Stefan.

Nano-lithography

紀錄類型:	書目-電子資源 : Monograph/item
正題名/作者:	Nano-lithographyedited by Stefan Landis.
其他作者:	Landis, Stefan.
出版者:	London :John Wiley and Sons,2011.
面頁冊數:	1 online resource (353 p.)
標題:	Nanolithography.
電子資源:	http://onlinelibrary.wiley.com/book/10.1002/9781118622582
ISBN:	9781118622582 (electronic bk.)

Nano-lithography
Nano-lithography[electronic resource] /edited by Stefan Landis. - 1st ed. - London :John Wiley and Sons,2011. - 1 online resource (353 p.) - ISTE. - ISTE..

Includes bibliographical references and index.

ISBN: 9781118622582 (electronic bk.)Subjects--Topical Terms:

752431
Nanolithography.

LC Class. No.: TK7872.M3 / N3613 2011

Dewey Class. No.: 621.381531

Nano-lithography
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245 0 0 $a Nano-lithography $h [electronic resource] / $c edited by Stefan Landis.
250 $a 1st ed.
260 $a London : $b John Wiley and Sons, $c 2011.
300 $a 1 online resource (353 p.)
490 1 $a ISTE
504 $a Includes bibliographical references and index.
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700 1 $a Landis, Stefan. $3 757501
830 0 $a ISTE. $3 698802
856 4 0 $u http://onlinelibrary.wiley.com/book/10.1002/9781118622582

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EB TK7872.M3 N186 2011

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http://onlinelibrary.wiley.com/book/10.1002/9781118622582

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