紀錄類型: |
書目-電子資源
: Monograph/item
|
正題名/作者: |
Fabrication of micro/nano structures via precision machiningedited by Guoqing Zhang ... [et al.]. |
其他題名: |
modelling, processing and evaluation / |
其他作者: |
Zhang, Guoqing. |
出版者: |
Singapore :Springer Nature Singapore :2023. |
面頁冊數: |
xii, 398 p. :ill., digital ;24 cm. |
Contained By: |
Springer Nature eBook |
標題: |
Micromachining. |
電子資源: |
https://doi.org/10.1007/978-981-99-1338-1 |
ISBN: |
9789819913381$q(electronic bk.) |