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Advanced MEMS packaging

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Lau, John H.

Advanced MEMS packaging

紀錄類型:	書目-電子資源 : Monograph/item
正題名/作者:	Advanced MEMS packagingJohn H. Lau ... [et al.].
其他題名:	Advanced microelectromechanical systems packaging.
其他作者:	Lau, John H.
出版者:	New York :McGraw-Hill,c2010.
面頁冊數:	xxiii, 552 p. :ill.
標題:	Microelectromechanical systems.
電子資源:	Click for full text (McGrawHill)
ISBN:	9780071626231

Advanced MEMS packaging
Advanced MEMS packaging[electronic resource] /Advanced microelectromechanical systems packaging.John H. Lau ... [et al.]. - New York :McGraw-Hill,c2010. - xxiii, 552 p. :ill.

Enabling technologies for advanced MEMS packaging -- Advanced MEMS wafer-level packaging -- Optical MEMS packaging : communications -- Optical MEMS packaging : bubble switch -- Optical MEMS : microbolometer packaging -- Bio-MEMS packaging -- Biosensor packaging -- Accelerometer packaging -- Radiofrequency MEMS switches -- RF MEMS tunable capacitors and tubable band-pass filters -- Advanced packaging of RF MEMS devices.

ISBN: 9780071626231

LCCN: 2009040456Subjects--Topical Terms:

189825
Microelectromechanical systems.
Index Terms--Genre/Form:

214472
Electronic books.

LC Class. No.: TK7875 / .A378 2010

Dewey Class. No.: 621.381/046

Advanced MEMS packaging
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245 0 0 $a Advanced MEMS packaging $h [electronic resource] / $c John H. Lau ... [et al.].
246 3 $a Advanced microelectromechanical systems packaging.
260 $a New York : $b McGraw-Hill, $c c2010.
300 $a xxiii, 552 p. : $b ill.
505 0 $a Enabling technologies for advanced MEMS packaging -- Advanced MEMS wafer-level packaging -- Optical MEMS packaging : communications -- Optical MEMS packaging : bubble switch -- Optical MEMS : microbolometer packaging -- Bio-MEMS packaging -- Biosensor packaging -- Accelerometer packaging -- Radiofrequency MEMS switches -- RF MEMS tunable capacitors and tubable band-pass filters -- Advanced packaging of RF MEMS devices.
650 0 $a Microelectromechanical systems. $3 189825
650 0 $a Microelectronic packaging. $3 182088
655 7 $a Electronic books. $2 local. $3 214472
700 1 $a Lau, John H. $3 205101
856 4 $u http://taebcmgh.sa.libraryandbook.net/FE/advanceSearch.do?method=toView&id=YsdsdebY187122d3Y $z Click for full text (McGrawHill)

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