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Sputtering materials for VLSI and th...

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Sarkar, Jaydeep, ((Materials scientist))

Sputtering materials for VLSI and thin film devices

紀錄類型:	書目-電子資源 : Monograph/item
正題名/作者:	Sputtering materials for VLSI and thin film devicesby Jaydeep Sarkar.
作者:	Sarkar, Jaydeep,
出版者:	Norwich, N.Y. :William Andrew ;2011.
面頁冊數:	x, 603 p. :ill. ;25 cm.
標題:	MicroelectronicsMaterials.
電子資源:	http://www.sciencedirect.com/science/book/9780815515937
ISBN:	9780815515937 (electronic bk.)

Sputtering materials for VLSI and thin film devices
Sarkar, Jaydeep,(Materials scientist)

Sputtering materials for VLSI and thin film devices[electronic resource] /by Jaydeep Sarkar. - Norwich, N.Y. :William Andrew ;2011. - x, 603 p. :ill. ;25 cm.

Includes bibliographical references and index.

ISBN: 9780815515937 (electronic bk.)Subjects--Topical Terms:

184283
Microelectronics
--Materials.

LC Class. No.: TK7874 / .S273 2014

Dewey Class. No.: 621.381

Sputtering materials for VLSI and thin film devices
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260 $a Norwich, N.Y. : $b William Andrew ; $a Oxford : $b Elsevier Science [distributor], $c 2011.
300 $a x, 603 p. : $b ill. ; $c 25 cm.
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650 0 $a Sputtering (Physics) $3 667881
856 4 0 $u http://www.sciencedirect.com/science/book/9780815515937

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