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[ subject:"Dielectrics." ]
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Hf-based high-k dielectrics :process...
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Kim, Young-Hee, (1972-)
Hf-based high-k dielectrics :process development, performance characterization, and reliability /
紀錄類型:
書目-語言資料,印刷品 : Monograph/item
正題名/作者:
Hf-based high-k dielectrics :Young-Hee Kim, Jack C. Lee.
其他題名:
process development, performance characterization, and reliability /
作者:
Kim, Young-Hee,
其他作者:
Lee, Jack Chung-Yeung.
出版者:
[San Rafael, Calif.] :Morgan & Claypool Publishers,c2005.
面頁冊數:
x, 92 p. :ill. ;24 cm.
附註:
This volume is a printed version of a work that appears in, "Synthesis, the digital library of engineering and computer science."
叢書名:
Synthesis lectures on solid state materials and devices ;
標題:
Dielectrics.
ISBN:
1598290045 (pbk.) :
Hf-based high-k dielectrics :process development, performance characterization, and reliability /
Kim, Young-Hee,1972-
Hf-based high-k dielectrics :
process development, performance characterization, and reliability /Young-Hee Kim, Jack C. Lee. - [San Rafael, Calif.] :Morgan & Claypool Publishers,c2005. - x, 92 p. :ill. ;24 cm. - Synthesis lectures on solid state materials and devices ;v. 1, no. 1.
This volume is a printed version of a work that appears in, "Synthesis, the digital library of engineering and computer science."
Includes bibliographical references.
ISBN: 1598290045 (pbk.) :NT$1150Subjects--Topical Terms:
234857
Dielectrics.
LC Class. No.: QC585 / K49 2005
Hf-based high-k dielectrics :process development, performance characterization, and reliability /
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process development, performance characterization, and reliability /
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Dielectrics.
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Hafnium oxide.
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Semiconductors
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