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Handbook of silicon based MEMS :mate...

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Lindroos, Veikko

Handbook of silicon based MEMS :materials and technologies/

紀錄類型:	書目-語言資料,印刷品 : Monograph/item
正題名/作者:	Handbook of silicon based MEMS :Veikko Lindroos ... [et al.]
其他題名:	materials and technologies/
其他作者:	Lindroos, Veikko
出版者:	Norwich, N.Y. :William Andrew ;2009
面頁冊數:	xxxii, 636 p. :ill. ;29 cm.
標題:	Microelectromechanical systemsMaterials
ISBN:	9780815515944 :

Handbook of silicon based MEMS :materials and technologies/
Handbook of silicon based MEMS :materials and technologies/Veikko Lindroos ... [et al.] - 1st ed. - Norwich, N.Y. :William Andrew ;2009 - xxxii, 636 p. :ill. ;29 cm.

Includes bibliographical references and index.

ISBN: 9780815515944 :NT$6871

Nat. Bib. No.: GBA974559bnb Subjects--Topical Terms:

383943
Microelectromechanical systems
--Materials

LC Class. No.: TK7872

Dewey Class. No.: 621.38152

Handbook of silicon based MEMS :materials and technologies/
LDR:00646nam a2200205 450 001 239825
003 OCoLC
005 20100226020719.0
008 100403s2010 nyua b 001 0 eng d
015 $a GBA974559 $2 bnb
020 $a 9780815515944 : $c NT$6871
035 $a (OCoLC)428777214
035 $a 428777214
040 $a UKM $c UKM $d BWX $d CDX
050 4 $a TK7872
082 0 4 $a 621.38152 $2 22
245 0 0 $a Handbook of silicon based MEMS : $b materials and technologies/ $c Veikko Lindroos ... [et al.]
250 $a 1st ed.
260 $a Norwich, N.Y. : $a Oxford : $b William Andrew ; $c 2009 $b Elsevier Science [distributor],
300 $a xxxii, 636 p. : $b ill. ; $c 29 cm.
504 $a Includes bibliographical references and index.
650 0 $a Microelectromechanical systems $x Materials $3 383943
650 0 $a Microelectromechanical systems $3 383944
650 0 $a Silicon $x Electric properties $3 383945
700 1 $a Lindroos, Veikko $3 383942

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