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[ subject:"Microelectromechanical systems." ]
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Handbook of silicon based MEMS mater...
~
Tilli, Markku.
Handbook of silicon based MEMS materials and technologies
紀錄類型:
書目-電子資源 : Monograph/item
正題名/作者:
Handbook of silicon based MEMS materials and technologiesedited by Markku Tilli ... [et al.]
其他作者:
Tilli, Markku.
出版者:
London, UK :William Andrew,2015.
面頁冊數:
1 online resource :ill.
標題:
Microelectromechanical systems.
電子資源:
click for full text
ISBN:
9780323312233 (electronic bk.)
Handbook of silicon based MEMS materials and technologies
Handbook of silicon based MEMS materials and technologies
[electronic resource] /edited by Markku Tilli ... [et al.] - 2nd ed. - London, UK :William Andrew,2015. - 1 online resource :ill. - Micro & nano technologies. - Micro & nano technologies..
Includes bibliographical references and index.
The Handbook of Silicon Based MEMS Materials and Technologies, Second Edition, is a comprehensive guide to MEMS materials, technologies, and manufacturing that examines the state-of-the-art with a particular emphasis on silicon as the most important starting material used in MEMS. The book explains the fundamentals, properties (mechanical, electrostatic, optical, etc.), materials selection, preparation, manufacturing, processing, system integration, measurement, and materials characterization techniques, sensors, and multi-scale modeling methods of MEMS structures, silicon crystals, and wafers, also covering micromachining technologies in MEMS and encapsulation of MEMS components. Furthermore, it provides vital packaging technologies and process knowledge for silicon direct bonding, anodic bonding, glass frit bonding, and related techniques, shows how to protect devices from the environment, and provides tactics to decrease package size for a dramatic reduction in costs.
ISBN: 9780323312233 (electronic bk.)Subjects--Topical Terms:
189825
Microelectromechanical systems.
Index Terms--Genre/Form:
214472
Electronic books.
LC Class. No.: TK7875
Dewey Class. No.: 621.3815/2
Handbook of silicon based MEMS materials and technologies
LDR
:01954nmm a2200289 a 4500
001
492231
003
UIUdb
005
20151007181855.0
006
m o d
007
cr cn|||||||||
008
170215s2015 ne a ob 001 0 eng
020
$a
9780323312233 (electronic bk.)
020
$a
0323312233 (electronic bk.)
020
$a
9780323299657 (electronic bk.)
035
$a
(OCoLC)ocn920564477
035
$a
16001025
040
$a
OPELS
$b
eng
$c
OPELS
$d
N
$d
YDXCP
$d
UIU
$d
UIUdb
041
0
$a
eng
050
4
$a
TK7875
082
0 4
$a
621.3815/2
$2
23
245
0 0
$a
Handbook of silicon based MEMS materials and technologies
$h
[electronic resource] /
$c
edited by Markku Tilli ... [et al.]
250
$a
2nd ed.
260
$a
London, UK :
$b
William Andrew,
$c
2015.
300
$a
1 online resource :
$b
ill.
490
1
$a
Micro & nano technologies
504
$a
Includes bibliographical references and index.
520
$a
The Handbook of Silicon Based MEMS Materials and Technologies, Second Edition, is a comprehensive guide to MEMS materials, technologies, and manufacturing that examines the state-of-the-art with a particular emphasis on silicon as the most important starting material used in MEMS. The book explains the fundamentals, properties (mechanical, electrostatic, optical, etc.), materials selection, preparation, manufacturing, processing, system integration, measurement, and materials characterization techniques, sensors, and multi-scale modeling methods of MEMS structures, silicon crystals, and wafers, also covering micromachining technologies in MEMS and encapsulation of MEMS components. Furthermore, it provides vital packaging technologies and process knowledge for silicon direct bonding, anodic bonding, glass frit bonding, and related techniques, shows how to protect devices from the environment, and provides tactics to decrease package size for a dramatic reduction in costs.
650
0
$a
Microelectromechanical systems.
$3
189825
650
0
$a
Microelectromechanical systems
$x
Materials.
$3
511661
650
0
$a
Silicon
$x
Electric properties.
$3
225186
655
4
$a
Electronic books.
$2
local.
$3
214472
700
1
$a
Tilli, Markku.
$3
752116
830
0
$a
Micro & nano technologies.
$3
454929
856
4 0
$u
http://www.sciencedirect.com/science/book/9780323299657
$z
click for full text
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