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Chemical vapor deposition :thermal a...

Sivaram, S.

Chemical vapor deposition :thermal and plasma deposition of electronic materials /

Record Type:	Language materials, printed : Monograph/item
Title/Author:	Chemical vapor deposition :S. Sivaram.
Reminder of title:	thermal and plasma deposition of electronic materials /
Author:	Sivaram, S.
Published:	New York :Van Nostrand Reinhold,c1995.
Description:	xii, 292 p. :ill. ;24 cm.
Subject:	Microelectronics industry.
ISBN:	0442010796 :

Chemical vapor deposition :thermal and plasma deposition of electronic materials /
Sivaram, S.

Chemical vapor deposition :thermal and plasma deposition of electronic materials /S. Sivaram. - New York :Van Nostrand Reinhold,c1995. - xii, 292 p. :ill. ;24 cm.

Includes bibliographical references and index.

ISBN: 0442010796 :NT$3,998

LCCN: 94039696 Subjects--Topical Terms:

184281
Microelectronics industry.

LC Class. No.: TK7836 / S624 1995

Dewey Class. No.: 621.3815/2

Chemical vapor deposition :thermal and plasma deposition of electronic materials /
LDR:00554nam 2200169 a 450 001 144042
005 19970108122022.0
008 090528s1995 nyua 001 0 eng
010 $a 94039696
020 $a 0442010796 : $c NT$3,998
035 $a 00004515
040 $a DLC $c DLC $d DLC
050 0 0 $a TK7836 $b S624 1995
082 0 0 $2 20 $a 621.3815/2
100 $a Sivaram, S. $3 184280
245 1 0 $a Chemical vapor deposition : $b thermal and plasma deposition of electronic materials / $c S. Sivaram.
260 $a New York : $c c1995. $b Van Nostrand Reinhold,
300 $a xii, 292 p. : $b ill. ; $c 24 cm.
504 $a Includes bibliographical references and index.
650 $a Microelectronics industry. $3 184281
650 $a Chemical vapor deposition. $3 184282
650 $a Microelectronics $x Materials. $3 184283