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Glancing angle deposition of thin fi...

Brett, Michael J.

Glancing angle deposition of thin filmsengineering the nanoscale /

紀錄類型:	書目-電子資源 : Monograph/item
正題名/作者:	Glancing angle deposition of thin filmsMatthew M. Hawkeye, Michael T. Taschuk, Michael J. Brett.
其他題名:	engineering the nanoscale /
作者:	Hawkeye, Matthew M.
其他作者:	Taschuk, Michael T.
出版者:	Chichester, West Sussex, United Kingdom :Wiley,2014.
面頁冊數:	1 online resource.
標題:	Nanotechnology.
電子資源:	http://onlinelibrary.wiley.com/book/10.1002/9781118847510
ISBN:	9781118847336 (ePub)

Glancing angle deposition of thin filmsengineering the nanoscale /
Hawkeye, Matthew M.

Glancing angle deposition of thin filmsengineering the nanoscale /[electronic resource] :Matthew M. Hawkeye, Michael T. Taschuk, Michael J. Brett. - Chichester, West Sussex, United Kingdom :Wiley,2014. - 1 online resource. - Wiley series in materials for electronic and optoelectronic applications. - Wiley series in materials for electronic and optoelectronic applications..

Includes bibliographical references and index.

ISBN: 9781118847336 (ePub)

LCCN: 2014022002Subjects--Topical Terms:

193873
Nanotechnology.

LC Class. No.: T174.7

Dewey Class. No.: 621.3815/2

Glancing angle deposition of thin filmsengineering the nanoscale /
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020 $a 1118847326 (Adobe PDF)
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245 1 0 $a Glancing angle deposition of thin films $h [electronic resource] : $b engineering the nanoscale / $c Matthew M. Hawkeye, Michael T. Taschuk, Michael J. Brett.
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490 1 $a Wiley series in materials for electronic and optoelectronic applications
504 $a Includes bibliographical references and index.
588 $a Description based on print version record and CIP data provided by publisher.
650 0 $a Nanotechnology. $3 193873
650 0 $a Chemical vapor deposition. $3 184282
650 0 $a Nanoelectromechanical systems $x Design and construction. $3 722773
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