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Optical diagnostics for thin film pr...

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Herman, Irving P.

Optical diagnostics for thin film processing

紀錄類型:	書目-電子資源 : Monograph/item
正題名/作者:	Optical diagnostics for thin film processingIrving P. Herman.
作者:	Herman, Irving P.
出版者:	San Diego, CA :Academic Press,c1996.
面頁冊數:	xxix, 783 p. :ill. ;24 cm.
標題:	Spectrum analysisIndustrial applications.
電子資源:	http://www.sciencedirect.com/science/book/9780123420701
ISBN:	9780123420701 (electronic bk.)

Optical diagnostics for thin film processing
Herman, Irving P.

Optical diagnostics for thin film processing[electronic resource] /Irving P. Herman. - San Diego, CA :Academic Press,c1996. - xxix, 783 p. :ill. ;24 cm.

Includes bibliographical references and index.

ISBN: 9780123420701 (electronic bk.)

LCCN: 95016540 Subjects--Topical Terms:

646682
Spectrum analysis
--Industrial applications.

LC Class. No.: QC176.84.S93 / H47 1996

Dewey Class. No.: 621.3815/2/0287

Optical diagnostics for thin film processing
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050 0 0 $a QC176.84.S93 $b H47 1996
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100 1 $a Herman, Irving P. $3 646681
245 1 0 $a Optical diagnostics for thin film processing $h [electronic resource] / $c Irving P. Herman.
260 $a San Diego, CA : $b Academic Press, $c c1996.
300 $a xxix, 783 p. : $b ill. ; $c 24 cm.
504 $a Includes bibliographical references and index.
650 0 $a Spectrum analysis $x Industrial applications. $3 646682
650 0 $a Thin films $x Surfaces. $3 225106
856 4 0 $u http://www.sciencedirect.com/science/book/9780123420701

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