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Search result for
[ subject:"Plasma etching."]
10 records (0.031s)
·
Page 1 of 1
•
1
1
.
Plasma processes for semiconductor f...
~
Hitchon, W. Nicholas G.
Plasma processes for semiconductor fabrication /
by:
Hitchon, W. Nicholas G.
Language materials, printed
: Monograph/item
Publisher:
Cambridge University Press,
Place of Publication:
New York :
Year of Publication:
2005
ISBN:
0521018005; 0521591759; 9780521018005; 9780521591751
Availability
:
1 Copie(s) available
|
1 Copie(s) available for loan
based on 0 review(s)
2
.
Dry etching for VLSI /
~
Baggerman, J. A. G.
Dry etching for VLSI /
by:
Baggerman, J. A. G.; Brader, S. J. H.; Roosmalen, A. J. van.
Language materials, printed
: Monograph/item
Publisher:
Plenum Press,
Place of Publication:
New York :
Year of Publication:
1991
ISBN:
0306438356; 9780306438356
Availability
:
1 Copie(s) available
|
1 Copie(s) available for loan
based on 0 review(s)
3
.
Plasma properties, deposition and et...
~
Alterowitz, Samuel A.
Plasma properties, deposition and etching /
by:
Alterowitz, Samuel A.; Pouch, John J.
Language materials, printed
: Monographic component part
Publisher:
Trans Tech Publications,
Place of Publication:
Aedermannsdorf, Switzerland :
Year of Publication:
1993
ISBN:
087849670X; 9780878496709
Availability
:
1 Copie(s) available
|
1 Copie(s) available for loan
based on 0 review(s)
4
.
Plasma etching processes for CMOS de...
~
Posseme, Nicolas.
Plasma etching processes for CMOS device realization /
by:
Posseme, Nicolas.
Language materials, printed
: Monograph/item
Publisher:
Elsevier Ltd,; ISTE Press Ltd ;
Place of Publication:
London :
Year of Publication:
2017
ISBN:
1785480960; 9781785480966
Availability
:
1 Copie(s) available
|
1 Copie(s) available for loan
based on 0 review(s)
5
.
Plasma etching processes for CMOS de...
~
Posseme, Nicolas,
Plasma etching processes for CMOS device realization /
by:
Posseme, Nicolas,
Electronic resources
: Monograph/item
Language:
英文
Year of Publication:
2017
ISBN:
0081011962; 1785480960; 9780081011966; 9781785480966
Availability
:
1 Copie(s) available
|
1 Copie(s) available for loan
based on 0 review(s)
6
.
Principles of plasma discharges and materials processing /
by:
John Wiley & Sons.; Lichtenberg, Allan J.; Lieberman, M. A.
Electronic resources
: Monograph/item
Publisher:
Wiley,
Place of Publication:
Hoboken, N.J. :
Year of Publication:
2005
ISBN:
0471720011; 0471724254
Availability
:
1 Copie(s) available
|
1 Copie(s) available for loan
based on 0 review(s)
7
.
A Systematic Study of GaN Static Induction Transistors (a.k.a. Vertical FinFETs) for RF Applications.
by:
Jeong, Seungbin.; Stanford University.
Electronic resources
: Monograph/item
Publisher:
ProQuest Dissertations & Theses,
Place of Publication:
Ann Arbor :
Year of Publication:
2023
ISBN:
9798381020458
Availability
:
1 Copie(s) available
|
1 Copie(s) available for loan
based on 0 review(s)
8
.
Dry etching technology for semicondu...
~
Nojiri, Kazuo.
Dry etching technology for semiconductors
by:
Nojiri, Kazuo.; SpringerLink (Online service)
Electronic resources
: Monograph/item
Language:
英文
Publisher:
Imprint: Springer,; Springer International Publishing :
Place of Publication:
Cham :
Year of Publication:
2015
ISBN:
9783319102948; 9783319102955
Availability
:
1 Copie(s) available
|
1 Copie(s) available for loan
based on 0 review(s)
9
.
Feature profile evolution in plasma ...
~
Samukawa, Seiji.
Feature profile evolution in plasma processing using on-wafer monitoring system
by:
Samukawa, Seiji.; SpringerLink (Online service)
Electronic resources
: Monograph/item
Language:
英文
Publisher:
Imprint: Springer,; Springer Japan :
Place of Publication:
Tokyo :
Year of Publication:
2014
ISBN:
9784431547945; 9784431547952
Availability
:
1 Copie(s) available
|
1 Copie(s) available for loan
based on 0 review(s)
10
.
Low pressure plasmas and microstruct...
~
Franz, Gerhard.
Low pressure plasmas and microstructuring technology
by:
Franz, Gerhard.; SpringerLink (Online service)
Electronic resources
: Monograph/item
Publisher:
Springer-Verlag Berlin Heidelberg,
Place of Publication:
Berlin, Heidelberg :
Year of Publication:
2009
ISBN:
9783540858485; 9783540858492
Availability
:
1 Copie(s) available
|
1 Copie(s) available for loan
based on 0 review(s)
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