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Microelectromechanical systems series

書目資訊

An introduction to microelectromecha...

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Maluf, Nadim.

An introduction to microelectromechanical systems engineering /

by: Maluf, Nadim.

RF MEMS circuit design for wireless ...

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Santos, Hector J. de los.

RF MEMS circuit design for wireless communications /

by: Santos, Hector J. de los.

Post-process techniques for integrat...

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Sedky, Sherif.

Post-process techniques for integrated MEMS /

by: Sedky, Sherif.

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