Microelectromechanical systems - Design and construction.

Overview

Works:	17 works in 7 publications in 7 languages

Titles

Fundamentals of microfabrication :the science of miniaturization / by: (Language materials, printed)

Microfabrication and nanomanufacturing / by: (Language materials, printed)

MEMS/NEMSHandbook Techniques and Applications / by: (Electronic resources)

Scaling issues and design of MEMS / by: (Language materials, printed)

Microfabrication and nanomanufacturing by: (Electronic resources)

Microsystem design by: (Electronic resources)

Advanced materials and technologies for micro/nano-devices, sensors and actuators by: (Electronic resources)

Introduction to microsystem design by: (Electronic resources)

Microstereolithography and other fabrication techniques for 3D MEMS / by: (Language materials, printed)

Ceramic thick films for MEMS and microdevices by: (Electronic resources)

Subjects

Lasers