Plasma etching.

Principles of plasma discharges and materials processing / by: (Electronic resources)

Plasma processes for semiconductor fabrication / by: (Language materials, printed)

Dry etching for VLSI / by: (Language materials, printed)

Plasma properties, deposition and etching / by: (Language materials, printed)

Low pressure plasmas and microstructuring technology by: (Electronic resources)

Feature profile evolution in plasma processing using on-wafer monitoring system by: (Electronic resources)

Dry etching technology for semiconductors by: (Electronic resources)

Plasma etching processes for CMOS device realization / by: (Language materials, printed)

Plasma etching processes for CMOS device realization / by: (Electronic resources)

A Systematic Study of GaN Static Induction Transistors (a.k.a. Vertical FinFETs) for RF Applications. by: (Electronic resources)

Nanoscale Science and Technology.

Semiconductors.

Plasma engineering.

Nanotechnology.

Condensed matter physics.

Plasma etching.

Material Science.

Electronics and Microelectronics, Instrumentation.

Surfaces and Interfaces, Thin Films.

Plasma Physics.

Metal oxide semiconductors, Complementary

Transistors.

Electrical engineering.

Plasma dynamics.

Plasma diagnostics.

Circuits and Systems.

Atomic and Molecular Structure and Spectra.

Nanotechnology and Microengineering.

Plasma chemistry

Semiconductors

Plasma (Ionized gases)

Optical and Electronic Materials.

Engineering.

Thin films

Integrated circuits

Electronic Circuits and Devices.

Metal oxide semiconductors, Complementary.