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Handbook for critical cleaning /

~

Kanegsberg, Barbara.

Handbook for critical cleaning /

紀錄類型:	書目-語言資料,印刷品 : Monograph/item
正題名/作者:	Handbook for critical cleaning /editor-in-chief, Barbara Kanegsberg ; associate editor, Edward Kanegsberg.
其他作者:	Kanegsberg, Barbara.
出版者:	Boca Raton, FL :CRC Press,2001.
面頁冊數:	658 p. :ill. ;27 cm.
標題:	Integrated circuitsCleaning.
ISBN:	0849316553 :

Handbook for critical cleaning /
Handbook for critical cleaning /editor-in-chief, Barbara Kanegsberg ; associate editor, Edward Kanegsberg. - Boca Raton, FL :CRC Press,2001. - 658 p. :ill. ;27 cm.

Includes bibliographical references and index.

ISBN: 0849316553 :NT$2560

LCCN: 00048568 Subjects--Topical Terms:

189496
Integrated circuits
--Cleaning.

LC Class. No.: TK7874 / .H348 2000

Dewey Class. No.: 621.381/046

Handbook for critical cleaning /
LDR:00601nam 2200193 a 450 001 146087
005 19990406145727.0
008 090528s2001 flua b 00100 eng
010 $a 00048568
020 $a 0849316553 : $c NT$2560
035 $a 00019693
040 $a DLC $c DLC
041 $a eng
042 $a pcc
050 0 0 $a TK7874 $b .H348 2000
082 0 0 $2 21 $a 621.381/046
245 0 0 $a Handbook for critical cleaning / $c editor-in-chief, Barbara Kanegsberg ; associate editor, Edward Kanegsberg.
260 $a Boca Raton, FL : $c 2001. $b CRC Press,
300 $a 658 p. : $b ill. ; $c 27 cm.
504 $a Includes bibliographical references and index.
650 $a Integrated circuits $x Cleaning. $3 189496
650 $a Manufacturing processes. $3 185481
650 $a Electronic packaging. $3 182161
650 $a Surface preparation. $3 189497
650 $a Surface chemistry. $3 189498
700 $a Kanegsberg, Barbara. $3 189494
700 $a Kanegsberg, Edward. $3 189495

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