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Field guide to optical lithography /

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Mack, Chris A.

Field guide to optical lithography /

紀錄類型:	書目-語言資料,印刷品 : Monograph/item
正題名/作者:	Field guide to optical lithography /Chris A. Mack.
作者:	Mack, Chris A.
出版者:	Bellingham, Wash. :SPIE Press,c2006.
面頁冊數:	xii, 122 p. :ill. ;21 cm.
叢書名:	SPIE field guides ;
標題:	Integrated circuitsDesign and construction.
電子資源:	http://www.loc.gov/catdir/toc/ecip064/2005034584.html
ISBN:	0819462071 (pbk.) :

Field guide to optical lithography /
Mack, Chris A.

Field guide to optical lithography /Chris A. Mack. - Bellingham, Wash. :SPIE Press,c2006. - xii, 122 p. :ill. ;21 cm. - SPIE field guides ;FG06.

Includes bibliographical references and index.

ISBN: 0819462071 (pbk.) :NT1005

LCCN: 2005034584Subjects--Topical Terms:

184690
Integrated circuits
--Design and construction.

LC Class. No.: TK7874 / .M195 2006

Dewey Class. No.: 621.3815/31

Field guide to optical lithography /
LDR:00752cam 22002174a 450 001 170076
003 DLC
005 20061013134744.0
008 090528s2006 waua b 001 0 eng
010 $a 2005034584
020 $a 0819462071 (pbk.) : $c NT1005
035 $a 00234111
040 $a DLC $c DLC $d DLC
042 $a pcc
050 0 0 $a TK7874 $b .M195 2006
082 0 0 $2 22 $a 621.3815/31
100 $a Mack, Chris A. $3 243499
245 1 0 $a Field guide to optical lithography / $c Chris A. Mack.
260 $a Bellingham, Wash. : $c c2006. $b SPIE Press,
300 $a xii, 122 p. : $b ill. ; $c 21 cm.
440 0 $a SPIE field guides ; $v FG06
504 $a Includes bibliographical references and index.
650 $a Integrated circuits $x Design and construction. $3 184690
650 $a Microlithography. $3 180021
856 4 1 $3 Table of contents only $u http://www.loc.gov/catdir/toc/ecip064/2005034584.html $z http://www.loc.gov/catdir/toc/ecip064/2005034584.html

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