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Gettering Defects in Semiconductors /

紀錄類型:	書目-電子資源 : Monograph/item
正題名/作者:	Gettering Defects in Semiconductors /by Victor A. Perevoschikov, Vladimir D. Skoupov.
作者:	Perevoschikov, Victor A..
其他作者:	Skoupov, Vladimir D..
出版者:	Berlin, Heidelberg :Springer Berlin Heidelberg,2005.
面頁冊數:	v.: digital
叢書名:	Springer Series in Advanced Microelectronics, ;
標題:	Optical materials
電子資源:	http://dx.doi.org/10.1007/3-540-29499-6
ISBN:	9783540262442 (paper)

Gettering Defects in Semiconductors /
Perevoschikov, Victor A..

Gettering Defects in Semiconductors /[electronic resource] /by Victor A. Perevoschikov, Vladimir D. Skoupov. - Berlin, Heidelberg :Springer Berlin Heidelberg,2005. - v.: digital - Springer Series in Advanced Microelectronics, ;19,1437-0387 ;.

ISBN: 9783540262442 (paper)Subjects--Topical Terms:

252496
Optical materials

LC Class. No.: QC611.6.D4 / P4713 2005

Dewey Class. No.: 621.3815/2

Gettering Defects in Semiconductors /
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245 1 0 $a Gettering Defects in Semiconductors / $c by Victor A. Perevoschikov, Vladimir D. Skoupov. $h [electronic resource] /
260 # $a Berlin, Heidelberg : $c 2005. $b Springer Berlin Heidelberg,
300 $b v.: digital
440 0 $a Springer Series in Advanced Microelectronics, ; $v 19, $x 1437-0387 ;
650 # 0 $a Optical materials $3 252496
650 # 0 $a Chemical engineering $3 253480
650 # 0 $a Chemistry $3 236337
650 # 0 $a Optical and Electronic Materials $3 252498
650 # 0 $a Industrial Chemistry/Chemical Engineering $3 253481
700 0 # $a Skoupov, Vladimir D.. $3 256001
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950 $a Chemistry and Materials Science (Springer-11644; ZDB-2-CMS)

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