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The MEMS handbook

El-Hak, M. Gad.

The MEMS handbook

紀錄類型:	書目-電子資源 : Monograph/item
正題名/作者:	The MEMS handbookedited by Mohamed Gad-el-Hak.
其他題名:	MEMS, applications
其他作者:	El-Hak, M. Gad.
出版者:	Boca Raton, Fla. ;CRC,2006.
面頁冊數:	3 v. (various pagings) ;27 cm.
附註:	Title from e-book title screen (viewed October 15, 2007).
叢書名:	Mechanical engineering series
標題:	Microelectromechanical systems.
電子資源:	Connect to MyiLibrary resource
ISBN:	9786610643264

The MEMS handbook
The MEMS handbook[electronic resource] /MEMS, applicationsedited by Mohamed Gad-el-Hak. - 2nd ed. - Boca Raton, Fla. ;CRC,2006. - 3 v. (various pagings) ;27 cm. - Mechanical engineering series.

Title from e-book title screen (viewed October 15, 2007).

Includes bibliographical references and index.

The 'MEMS Handbook' offers state-of-the-art coverage of microelectromechanical systems, including their design, fabrication & applications, as well as physical modeling.

Electronic reproduction.
UK :
MyiLibrary,
2007

Access may be limited to MIL affiliated libraries.

ISBN: 9786610643264Subjects--Topical Terms:

189825
Microelectromechanical systems.
Index Terms--Genre/Form:

214472
Electronic books.

LC Class. No.: TK7875 / .M4536 2006eb

Dewey Class. No.: 621.3'81

The MEMS handbook
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