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The MEMS handbook

El-Hak, M. Gad.

The MEMS handbook

Record Type:	Electronic resources : Monograph/item
Title/Author:	The MEMS handbookedited by Mohamed Gad-el-Hak.
remainder title:	MEMS, applications
other author:	El-Hak, M. Gad.
Published:	Boca Raton, Fla. ;CRC,2006.
Description:	3 v. (various pagings) ;27 cm.
Notes:	Title from e-book title screen (viewed October 15, 2007).
Series:	Mechanical engineering series
Subject:	Microelectromechanical systems.
Online resource:	Connect to MyiLibrary resource
ISBN:	9786610643264

The MEMS handbook
The MEMS handbook[electronic resource] /MEMS, applicationsedited by Mohamed Gad-el-Hak. - 2nd ed. - Boca Raton, Fla. ;CRC,2006. - 3 v. (various pagings) ;27 cm. - Mechanical engineering series.

Title from e-book title screen (viewed October 15, 2007).

Includes bibliographical references and index.

The 'MEMS Handbook' offers state-of-the-art coverage of microelectromechanical systems, including their design, fabrication & applications, as well as physical modeling.

Electronic reproduction.
UK :
MyiLibrary,
2007

Access may be limited to MIL affiliated libraries.

ISBN: 9786610643264Subjects--Topical Terms:

189825
Microelectromechanical systems.
Index Terms--Genre/Form:

214472
Electronic books.

LC Class. No.: TK7875 / .M4536 2006eb

Dewey Class. No.: 621.3'81

The MEMS handbook
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250 $a 2nd ed.
260 # $a Boca Raton, Fla. ; $a London : $c 2006. $b CRC,
300 $a 3 v. (various pagings) ; $c 27 cm.
366 $b 20050515 $c IP
440 0 $a Mechanical engineering series
500 $a Title from e-book title screen (viewed October 15, 2007).
504 $a Includes bibliographical references and index.
520 # $a The 'MEMS Handbook' offers state-of-the-art coverage of microelectromechanical systems, including their design, fabrication & applications, as well as physical modeling.
533 $a Electronic reproduction. $b UK : $c MyiLibrary, $d 2007 $n Access may be limited to MIL affiliated libraries. $n Available via World Wide Web.
650 # 0 $a Microelectromechanical systems. $3 189825
650 # 0 $a Microelectronics. $3 182484
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