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Multi-wafer rotating MEMS machinestu...

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Lang, Jeffrey H.

Multi-wafer rotating MEMS machinesturbines, generators, and engines /

紀錄類型:	書目-電子資源 : Monograph/item
正題名/作者:	Multi-wafer rotating MEMS machinesedited by Jeffrey H. Lang.
其他題名:	turbines, generators, and engines /
其他作者:	Lang, Jeffrey H.
出版者:	Boston, MA :Springer-Verlag US,2009.
面頁冊數:	xiii, 456 p. :ill., digital ;25 cm.
叢書名:	MEMS reference shelf,
Contained By:	Springer eBooks
標題:	Energy Technology.
電子資源:	http://dx.doi.org/10.1007/978-0-387-77747-4
ISBN:	9780387777474 (electronic bk.)

Multi-wafer rotating MEMS machinesturbines, generators, and engines /
Multi-wafer rotating MEMS machinesturbines, generators, and engines /[electronic resource] :edited by Jeffrey H. Lang. - Boston, MA :Springer-Verlag US,2009. - xiii, 456 p. :ill., digital ;25 cm. - MEMS reference shelf,1936-4407.

ISBN: 9780387777474 (electronic bk.)Subjects--Topical Terms:

338873
Energy Technology.

LC Class. No.: TK7875 / .M858 2009

Dewey Class. No.: 621.381

Multi-wafer rotating MEMS machinesturbines, generators, and engines /
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http://dx.doi.org/10.1007/978-0-387-77747-4

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