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Introductory MEMSfabrication and app...

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Adams, Thomas M.

Introductory MEMSfabrication and applications /

紀錄類型:	書目-電子資源 : Monograph/item
正題名/作者:	Introductory MEMSby Thomas M. Adams, Richard A. Layton.
其他題名:	fabrication and applications /
作者:	Adams, Thomas M.
其他作者:	Layton, Richard A.
出版者:	Boston, MA :Springer Science+Business Media, LLC,2010.
面頁冊數:	xv, 444 p. :ill. (some col.), digital ;25 cm.
Contained By:	Springer eBooks
標題:	Microelectromechanical systems.
電子資源:	http://dx.doi.org/10.1007/978-0-387-09511-0
ISBN:	9780387095110 (electronic bk.)

Introductory MEMSfabrication and applications /
Adams, Thomas M.

Introductory MEMSfabrication and applications /[electronic resource] :by Thomas M. Adams, Richard A. Layton. - Boston, MA :Springer Science+Business Media, LLC,2010. - xv, 444 p. :ill. (some col.), digital ;25 cm.

ISBN: 9780387095110 (electronic bk.)Subjects--Topical Terms:

189825
Microelectromechanical systems.

LC Class. No.: TK7875 / .A33 2010

Dewey Class. No.: 621.381

Introductory MEMSfabrication and applications /
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260 $a Boston, MA : $b Springer Science+Business Media, LLC, $c 2010.
300 $a xv, 444 p. : $b ill. (some col.), digital ; $c 25 cm.
650 0 $a Microelectromechanical systems. $3 189825
650 0 $a Electronic apparatus and appliances. $3 182369
650 0 $a Transducers. $3 197809
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650 2 4 $a Electronics and Microelectronics, Instrumentation. $3 274412
650 2 4 $a Circuits and Systems. $3 274416
650 2 4 $a Mechanics. $3 200022
650 2 4 $a Surfaces and Interfaces, Thin Films. $3 274441
650 2 4 $a Continuum Mechanics and Mechanics of Materials. $3 273691
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