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Advanced materials and technologies ...

Dideikin, Arthur.

Advanced materials and technologies for micro/nano-devices, sensors and actuators

紀錄類型:	書目-電子資源 : Monograph/item
正題名/作者:	Advanced materials and technologies for micro/nano-devices, sensors and actuatorsedited by Evgeni Gusev, Eric Garfunkel, Arthur Dideikin.
其他作者:	Dideikin, Arthur.
出版者:	Dordrecht :Springer Science+Business Media B.V.,2010.
面頁冊數:	322 p. :ill. (some col.), digital ;24 cm.
叢書名:	NATO Science for Peace and Security Series B : Physics and Biophysics,
Contained By:	Springer eBooks
標題:	Microelectromechanical systemsDesign and construction.
電子資源:	http://dx.doi.org/10.1007/978-90-481-3807-4
ISBN:	9789048138074 (electronic bk.)

Advanced materials and technologies for micro/nano-devices, sensors and actuators
Advanced materials and technologies for micro/nano-devices, sensors and actuators[electronic resource] /edited by Evgeni Gusev, Eric Garfunkel, Arthur Dideikin. - Dordrecht :Springer Science+Business Media B.V.,2010. - 322 p. :ill. (some col.), digital ;24 cm. - NATO Science for Peace and Security Series B : Physics and Biophysics,1874-6500.

ISBN: 9789048138074 (electronic bk.)Subjects--Topical Terms:

206811
Microelectromechanical systems
--Design and construction.

Dewey Class. No.: 621.381

Advanced materials and technologies for micro/nano-devices, sensors and actuators
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