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Silicon carbide microsystems for har...

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Azevedo, Robert G.

Silicon carbide microsystems for harsh environments

紀錄類型:	書目-電子資源 : Monograph/item
正題名/作者:	Silicon carbide microsystems for harsh environmentsby Muthu B.J. Wijesundara, Robert G. Azevedo.
作者:	Wijesundara, Muthu B.J.
其他作者:	Azevedo, Robert G.
出版者:	New York, NY :Springer Science+Business Media, LLC,2011.
面頁冊數:	xv, 232 p. :ill., digital ;24 cm.
叢書名:	MEMS reference shelf,
Contained By:	Springer eBooks
標題:	Microelectromechanical systems.
電子資源:	http://dx.doi.org/10.1007/978-1-4419-7121-0
ISBN:	9781441971210 (electronic bk.)

Silicon carbide microsystems for harsh environments
Wijesundara, Muthu B.J.

Silicon carbide microsystems for harsh environments[electronic resource] /by Muthu B.J. Wijesundara, Robert G. Azevedo. - New York, NY :Springer Science+Business Media, LLC,2011. - xv, 232 p. :ill., digital ;24 cm. - MEMS reference shelf,221936-4407 ;.

ISBN: 9781441971210 (electronic bk.)Subjects--Topical Terms:

189825
Microelectromechanical systems.

LC Class. No.: TK7875 / .W55 2011

Dewey Class. No.: 621.381

Silicon carbide microsystems for harsh environments
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245 1 0 $a Silicon carbide microsystems for harsh environments $h [electronic resource] / $c by Muthu B.J. Wijesundara, Robert G. Azevedo.
260 $a New York, NY : $b Springer Science+Business Media, LLC, $c 2011.
300 $a xv, 232 p. : $b ill., digital ; $c 24 cm.
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650 2 4 $a Electronics and Microelectronics, Instrumentation. $3 274412
650 2 4 $a Circuits and Systems. $3 274416
650 2 4 $a Nanotechnology and Microengineering. $3 348421
700 1 $a Azevedo, Robert G. $3 514330
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856 4 0 $u http://dx.doi.org/10.1007/978-1-4419-7121-0
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