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以溶膠凝膠法製作氧化鋅薄膜之光學特性研究 = Optical prope...

國立高雄大學應用物理學系碩士班

以溶膠凝膠法製作氧化鋅薄膜之光學特性研究 = Optical properties of sol-gel ZnO thin films

Record Type:	Language materials, printed : monographic
Paralel Title:	Optical properties of sol-gel ZnO thin films
Author:	蔡宛君,
Secondary Intellectual Responsibility:	國立高雄大學
Place of Publication:	[高雄市]
Published:	撰者;
Year of Publication:	2012[民101]
Description:	64面圖 : 30公分;
Subject:	光致螢光
Subject:	photoluminescence
Online resource:	http://handle.ncl.edu.tw/11296/ndltd/11514886977349642431
Notes:	參考書目：面61
Summary:	本研究將利用溶膠凝膠法-塗佈旋轉法製作氧化鋅(ZnO)半導體薄膜，對其進行結構及光性分析，分析的方式是利用光致螢光光譜技術及X光繞射法。我們將針對6個不同的製膜參數來探討對於氧化鋅薄膜的影響，(1)前退火溫度(2)後退火溫度(3)溶液反應天數(4)溶液濃度(5)螯合劑配比(6)膜厚，做一系列的薄膜。綜合以上的實驗結果，我將獲得單一晶向和光學特性良好的氧化鋅薄膜的各參數，再將較有研究價值變因的樣品進行激子特性分析，做更徹底的光學特性研究。從變溫光譜圖，我們觀察到在室溫中的發光峰值能量取決於樣品薄膜的光學品質。另外，樣品的粒徑大小會影響到激子-激子散射的出現。 The optical and structural properties of zinc oxide (ZnO) semiconductor thin film, grown by sol-gel spin-coating technique, were studied by photoluminescence and X-ray diffraction method. First, we examined the effect of 6 growth-conditions on ZnO thin films; (1) Pre-annealing temperature, (2) Post-annealing temperature, (3) aging-time, (4) Molar concentration of Zn2+, (5) Molar ratio of Zn 2+ ：MEA、(6) Film thickness. After acquiring the growth-parameters to obtain ZnO thin film with best optical and structural quality, we further studied the excitonic properties of the ZnO thin film thoroughly. We found that the photoluminescence peak energy of ZnO thin films at room temperature depends on the optical quality of the thin films. Furthermore, the appearance of inelastic exciton-exciton scattering in ZnO thin films depends crucially on the grain-size of the thin films.

以溶膠凝膠法製作氧化鋅薄膜之光學特性研究 = Optical properties of sol-gel ZnO thin films
蔡, 宛君

以溶膠凝膠法製作氧化鋅薄膜之光學特性研究 = Optical properties of sol-gel ZnO thin films / 蔡宛君撰 - [高雄市] : 撰者, 2012[民101]. - 64面 ; 圖 ; 30公分.
參考書目：面61.
光致螢光photoluminescence

以溶膠凝膠法製作氧化鋅薄膜之光學特性研究 = Optical properties of sol-gel ZnO thin films
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330 $a 本研究將利用溶膠凝膠法-塗佈旋轉法製作氧化鋅(ZnO)半導體薄膜，對其進行結構及光性分析，分析的方式是利用光致螢光光譜技術及X光繞射法。我們將針對6個不同的製膜參數來探討對於氧化鋅薄膜的影響，(1)前退火溫度(2)後退火溫度(3)溶液反應天數(4)溶液濃度(5)螯合劑配比(6)膜厚，做一系列的薄膜。綜合以上的實驗結果，我將獲得單一晶向和光學特性良好的氧化鋅薄膜的各參數，再將較有研究價值變因的樣品進行激子特性分析，做更徹底的光學特性研究。從變溫光譜圖，我們觀察到在室溫中的發光峰值能量取決於樣品薄膜的光學品質。另外，樣品的粒徑大小會影響到激子-激子散射的出現。 The optical and structural properties of zinc oxide (ZnO) semiconductor thin film, grown by sol-gel spin-coating technique, were studied by photoluminescence and X-ray diffraction method. First, we examined the effect of 6 growth-conditions on ZnO thin films; (1) Pre-annealing temperature, (2) Post-annealing temperature, (3) aging-time, (4) Molar concentration of Zn2+, (5) Molar ratio of Zn 2+ ：MEA、(6) Film thickness. After acquiring the growth-parameters to obtain ZnO thin film with best optical and structural quality, we further studied the excitonic properties of the ZnO thin film thoroughly. We found that the photoluminescence peak energy of ZnO thin films at room temperature depends on the optical quality of the thin films. Furthermore, the appearance of inelastic exciton-exciton scattering in ZnO thin films depends crucially on the grain-size of the thin films.
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