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Adhesion aspects in MEMS-NEMS

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Dugger, M. T.

Adhesion aspects in MEMS-NEMS

紀錄類型:	書目-電子資源 : Monograph/item
正題名/作者:	Adhesion aspects in MEMS-NEMSedited by S.H. Kim, M.T. Dugger and K.L. Mittal.
其他作者:	Kim, Seong H.
出版者:	Leiden ;Vsp,c2010
面頁冊數:	1 online resource (xi, 409 p.) :ill.
附註:	Includes bibliographical references.
標題:	Microelectromechanical systems.
電子資源:	http://www.crcnetbase.com/isbn/978-90-04-19094-8
ISBN:	9004190953 (electronic bk.)

Adhesion aspects in MEMS-NEMS
Adhesion aspects in MEMS-NEMS[electronic resource] /edited by S.H. Kim, M.T. Dugger and K.L. Mittal. - Leiden ;Vsp,c2010 - 1 online resource (xi, 409 p.) :ill.

Includes bibliographical references.

ISBN: 9004190953 (electronic bk.)Subjects--Topical Terms:

189825
Microelectromechanical systems.
Index Terms--Genre/Form:

214472
Electronic books.

LC Class. No.: TK7875 / .A34 2010

Dewey Class. No.: 621.381

Adhesion aspects in MEMS-NEMS
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006 m o d
007 cr |n|||||||||
008 140128s2010 ne a o 000 0 eng d
020 $a 9004190953 (electronic bk.)
020 $a 9789004190955 (electronic bk.)
020 $z 9789004190948 (hbk.)
020 $z 9004190945 (hbk.)
035 $a ocn824353879
040 $a YDXCP $c YDXCP $d OCLCO $d E7B
050 4 $a TK7875 $b .A34 2010
082 0 4 $a 621.381 $2 22
245 0 0 $a Adhesion aspects in MEMS-NEMS $h [electronic resource] / $c edited by S.H. Kim, M.T. Dugger and K.L. Mittal.
260 $a Leiden ; $a Boston : $b Vsp, $c c2010
300 $a 1 online resource (xi, 409 p.) : $b ill.
500 $a Includes bibliographical references.
588 $a Description based on print version record.
650 0 $a Microelectromechanical systems. $3 189825
650 0 $a Nanoelectromechanical systems. $3 321655
650 0 $a Adhesion. $3 346049
650 0 $a Surfaces (Technology) $3 190551
655 4 $a Electronic books. $2 local. $3 214472
700 1 $a Kim, Seong H. $3 649597
700 1 $a Dugger, M. T. $q (Michael T.) $3 649598
700 1 $a Mittal, K. L., $d 1945- $3 237632
856 4 0 $u http://www.crcnetbase.com/isbn/978-90-04-19094-8

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EB TK7875 .A34 c2010

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http://www.crcnetbase.com/isbn/978-90-04-19094-8

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