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半導體超純水系統失效模式探討 = A Study of FMEA on ...

呂宏元

半導體超純水系統失效模式探討 = A Study of FMEA on the Semiconductor Ultrapure Water System

紀錄類型:	書目-語言資料,印刷品 : 單行本
並列題名:	A Study of FMEA on the Semiconductor Ultrapure Water System
作者:	呂宏元,
其他團體作者:	國立高雄大學
出版地:	[高雄市]
出版者:	撰者;
出版年:	2014[民103]
面頁冊數:	54葉圖,表 : 30公分;
標題:	失效模式
標題:	semiconductor
電子資源:	https://hdl.handle.net/11296/e5q9tz
附註:	108年10月31日公開
附註:	參考書目：葉53-54
摘要註:	本研究著眼於半導體超純水系統，對半導體超純水系統在日常管理保養階段常面臨的流程失效問題，建構故障分析模式，預先考量造成製程失效的關鍵原因。使管理人員在有限的時間及成本下，集中在關鍵原因的改善上。如此將可有效縮短解決系統流程故障問題的時間，以達到縮短恢復時間及縮減保養成本的目的。再者隨著半導體製程的進步、晶片複雜度增加、元件線路的微小化，其表面的微量雜質影響元件的特性與可靠度的機會愈高。晶圓需在每一個步驟被重新清洗以去除表面雜質，所以超純水的純度及清洗壓力對製程是頗為關鍵。若供水品質未達標準或不穩定將對元件產生危害造成產品良率降低。故將該系統的管理維護，以結構化、系統化的分析其工作流程，集合整理各流程所產生的故障原因與排除方式。完成半導體超純水系統的失效模式分析，發現各流程保養所應著重的重點，期能成為新進工程師所依循的規範，了解半導體超純水系統專案管理的脈絡達到知識分享的目的。 With advances in semiconductor process, increase of chip complexity, line of miniaturized components, the degree of the influence of the surface particles on functions and reliability of the chips is higher than before. Therefore, each wafer needs to be re-cleaned step to remove surface particles, the purity and pressure of the ultrapure water cleaning process is quite critical. If the water quality is sub-standard or unstable elements, chips will be damaged and the product yield will be decreased. The purpose of this study is to improve the performance of the semiconductor ultrapure water systems. First, the workflow of the daily management and maintenance of the system are analyzed in a structured and systematic method. Second, the causes and solutions of malfunction are compiled. Upon the Completion of the two steps of FMEA, it is found that the focus of each process is the maintenance, which is strongly suggested to be a new norm followed by engineers. The study of semiconductor ultrapure water system helps to understand the context of project management and achieve the purpose of knowledge sharing.

半導體超純水系統失效模式探討 = A Study of FMEA on the Semiconductor Ultrapure Water System
呂, 宏元

半導體超純水系統失效模式探討 = A Study of FMEA on the Semiconductor Ultrapure Water System / 呂宏元撰 - [高雄市] : 撰者, 2014[民103]. - 54葉 ; 圖,表 ; 30公分.
108年10月31日公開參考書目：葉53-54.
失效模式semiconductor

半導體超純水系統失效模式探討 = A Study of FMEA on the Semiconductor Ultrapure Water System
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