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1.有機溶劑在8至150 eV的絕對光游離率及電子轟擊游離與光游離之離子...
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國立高雄大學應用化學系碩士班
1.有機溶劑在8至150 eV的絕對光游離率及電子轟擊游離與光游離之離子產物絕對分支比研究2.五環芳香烴化合物在真空紫外光到可見光光譜研究 = 1. Absolute photoionization yields and ionization branching ratios of organic solvents studied by electron-impact and photo-impact methods in the 8 to 150 eV range2. Absorption and emission of five-member-ring polycyclic aromatics in the VUV to VIS range
紀錄類型:
書目-語言資料,印刷品 : 單行本
並列題名:
1. Absolute photoionization yields and ionization branching ratios of organic solvents studied by electron-impact and photo-impact methods in the 8 to 150 eV range2. Absorption and emission of five-member-ring polycyclic aromatics in the VUV to VIS range
作者:
黃彥翔,
其他團體作者:
國立高雄大學
出版地:
[高雄市]
出版者:
撰者;
出版年:
2013[民102]
面頁冊數:
145面圖,表 : 30公分;
標題:
電子轟擊游離
標題:
electron-impact ionization
電子資源:
http://handle.ncl.edu.tw/11296/ndltd/23506658914005106947
附註:
參考書目:面42-43
附註:
103年12月16日公開
摘要註:
1. 有機小分子在紫外光(UV)和極紫外光(EUV)的能量範圍內的光游離(PI)和電子轟擊游離(EI)的化學反應研究不僅為了瞭解物質在此光區的基礎科學,在工業上亦有重要的應用,例如在IC製造業上的EUV微影技術。本研究中PI的量測是在國家同步輻射研究中心的BL03A-HF-CGM、BL04B1-Seya及BL08A1-LSGM光束線上進行,而EI則是使用四極桿質譜儀中的RGA (Residual Gas Analysis, 殘留氣體分析法)模式,並使用不同的電子轟擊能量進行測量。本研究使用的12種有機小分子根據其分子結構分類,使用四極桿質譜儀(QMS)測量PI和EI在游離能至150 eV能量範圍的游離分支比,並以PIMS測量分子的相對光游離量子產率(PIQY)。本研究的電子轟擊游離分支比與NIST、MSSJ在70 eV的分支比具有良好的一致性;PIMS測得的量子產率與雙離子腔體法(DIC)的量測結果具有良好的一致性;Benzene、Toluene和DME的光游離分支比將與文獻值比較,並使用熱力學計算、歸納電子轟擊游離及光游離趨勢。藉由電子轟擊游離和光游離的比較發現兩方法的游離結果會有相似的斷鍵趨勢。2.多環芳香化合物(PAHs)在太空科學中被視為重要的有機物,科學家們致力於以PAHs分子的紅外光光譜解析在星際雲中的成分組成,卻甚少有關於真空紫外光(VUV)的吸收光譜。PAHs分子在環境科學中亦為常見的汙染物及致癌物,且美國環保署(EPA)明確指出16種最具致癌性的分子。本研究針對三種PAHs分子測量其固態與液態的真空紫外光到可見光(VIS)吸收光譜及可見光的激發與放射螢光光譜。本研究的真空紫外光到可見光吸收光譜分為兩部分測量,真空紫外光到紫外光的光源來自國家同步輻射研究中心的BL03A-HF-CGM光束線,紫外光到可見光則是使用UV-VIS光譜儀(Hitachi, U-3010)進行量測,而激發與放射螢光光譜使用FluorologR-3光譜儀(Jobin Yvon Horiba, FL3-11)量測。本研究的固態PAHs VUV-VIS吸收光譜與文獻值的比較中發現其吸收峰為原本benzene中1A1g→1E1u的電子躍遷,但因分子的對稱性下降而分裂,造成多個吸收峰的出現。液態PAHs的吸收光譜及激發與放射螢光光譜均與文獻值有良好的一致性,且液態PAHs的吸收峰皆可與固態吸收峰相對應。本研究亦發現在固態與液態的激發與放射螢光光譜中多不呈現鏡像對稱。 1. The photoionization (PI) and electron-impact ionization (EI) of small organic solvents in the ultraviolet and extreme ultraviolet (EUV) energy range are not only of fundamental interests, their underlying PI and EI chemistry are important for industrial applications, for example, in EUV lithography for IC manufacturing. The PI measurements were conducted at BL03A-HF-CGM, BL04B1-Seya and BL08A1-LSGM beamlines in the National Synchrotron Radiation Research Center, whereas the EI measurements were carried out by operating the QMS under an “RGA” (Residual Gas Analysis) mode using different electron-impact energy. The PI and EI spectra of 12 organic solvents, classified according to molecular structures, were examined in the threshold to 150 eV range with a quadrupole mass spectrometer (QMS) and the photoionization quantum yield (PIQY) were measured by photoionization mass spectrometry (PIMS). The electron-impact ionization branching ratios of this work are consistent with NIST’s and MSSJ’s at 70 eV, and the PIQY are also consistent with double ion chamber (DIC) method, whereas photoionization branching ratios of benzene, toluene and dimethyl ether (DME) are compared to literature values. We use the thermal chemical calculation to propose the tendency of PI and EI. By comparing the method of PI and EI, we find that the results of PI and EI are similar.2. Polycyclic aromatic hydrocarbons (PAHs) are considered the important medium in the space. Scientists used the PAHs’ infrared spectra to understand compositions in the interstellar, however, there were few vacuum ultraviolet (VUV) absorption spectra studies of PAHs. PAHs are common environmental pollutions and carcinogens, for sakes, United States Environmental Protection Agency had defined the carcinogenicity of 16 PAHs. We thus studied the VUV to VIS absorption and VIS fluorescence spectra of three PAHs in the solid and liquid phase. The measurements of VUV to VIS absorption spectra were separated in the two parts, VUV to UV and UV to VIS. The VUV to UV measurements were conducted at BL03A-HF-CGM beamline of the National Synchrotron Radiation Research Center, whereas the UV to VIS measurements were carried out by UV-VIS spectrometer (Hitachi, U-3010). The measurements of VIS fluorescence were operating by FluorologR-3 (Jobin Yvon Horiba, FL3-11). The peaks in the VUV to VIS absorption spectra of solid phase PAHs should form benzene-like 1A1g→1E1u transition, but the electron transition can split due to the reduction of molecular symmetry. The absorption and fluorescence spectra of liquid phase PAHs are consistence with literatures values, and the absorption position appears in the same energy region for both liquid and solid PAHs. We find that the excitation and emission spectra of most solid and liquid phase PAHs are not the mirror image.
1.有機溶劑在8至150 eV的絕對光游離率及電子轟擊游離與光游離之離子產物絕對分支比研究2.五環芳香烴化合物在真空紫外光到可見光光譜研究 = 1. Absolute photoionization yields and ionization branching ratios of organic solvents studied by electron-impact and photo-impact methods in the 8 to 150 eV range2. Absorption and emission of five-member-ring polycyclic aromatics in the VUV to VIS range
黃, 彥翔
1.有機溶劑在8至150 eV的絕對光游離率及電子轟擊游離與光游離之離子產物絕對分支比研究2.五環芳香烴化合物在真空紫外光到可見光光譜研究
= 1. Absolute photoionization yields and ionization branching ratios of organic solvents studied by electron-impact and photo-impact methods in the 8 to 150 eV range2. Absorption and emission of five-member-ring polycyclic aromatics in the VUV to VIS range / 黃彥翔撰 - [高雄市] : 撰者, 2013[民102]. - 145面 ; 圖,表 ; 30公分.
參考書目:面42-43103年12月16日公開.
電子轟擊游離electron-impact ionization
1.有機溶劑在8至150 eV的絕對光游離率及電子轟擊游離與光游離之離子產物絕對分支比研究2.五環芳香烴化合物在真空紫外光到可見光光譜研究 = 1. Absolute photoionization yields and ionization branching ratios of organic solvents studied by electron-impact and photo-impact methods in the 8 to 150 eV range2. Absorption and emission of five-member-ring polycyclic aromatics in the VUV to VIS range
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1. 有機小分子在紫外光(UV)和極紫外光(EUV)的能量範圍內的光游離(PI)和電子轟擊游離(EI)的化學反應研究不僅為了瞭解物質在此光區的基礎科學,在工業上亦有重要的應用,例如在IC製造業上的EUV微影技術。本研究中PI的量測是在國家同步輻射研究中心的BL03A-HF-CGM、BL04B1-Seya及BL08A1-LSGM光束線上進行,而EI則是使用四極桿質譜儀中的RGA (Residual Gas Analysis, 殘留氣體分析法)模式,並使用不同的電子轟擊能量進行測量。本研究使用的12種有機小分子根據其分子結構分類,使用四極桿質譜儀(QMS)測量PI和EI在游離能至150 eV能量範圍的游離分支比,並以PIMS測量分子的相對光游離量子產率(PIQY)。本研究的電子轟擊游離分支比與NIST、MSSJ在70 eV的分支比具有良好的一致性;PIMS測得的量子產率與雙離子腔體法(DIC)的量測結果具有良好的一致性;Benzene、Toluene和DME的光游離分支比將與文獻值比較,並使用熱力學計算、歸納電子轟擊游離及光游離趨勢。藉由電子轟擊游離和光游離的比較發現兩方法的游離結果會有相似的斷鍵趨勢。2.多環芳香化合物(PAHs)在太空科學中被視為重要的有機物,科學家們致力於以PAHs分子的紅外光光譜解析在星際雲中的成分組成,卻甚少有關於真空紫外光(VUV)的吸收光譜。PAHs分子在環境科學中亦為常見的汙染物及致癌物,且美國環保署(EPA)明確指出16種最具致癌性的分子。本研究針對三種PAHs分子測量其固態與液態的真空紫外光到可見光(VIS)吸收光譜及可見光的激發與放射螢光光譜。本研究的真空紫外光到可見光吸收光譜分為兩部分測量,真空紫外光到紫外光的光源來自國家同步輻射研究中心的BL03A-HF-CGM光束線,紫外光到可見光則是使用UV-VIS光譜儀(Hitachi, U-3010)進行量測,而激發與放射螢光光譜使用FluorologR-3光譜儀(Jobin Yvon Horiba, FL3-11)量測。本研究的固態PAHs VUV-VIS吸收光譜與文獻值的比較中發現其吸收峰為原本benzene中1A1g→1E1u的電子躍遷,但因分子的對稱性下降而分裂,造成多個吸收峰的出現。液態PAHs的吸收光譜及激發與放射螢光光譜均與文獻值有良好的一致性,且液態PAHs的吸收峰皆可與固態吸收峰相對應。本研究亦發現在固態與液態的激發與放射螢光光譜中多不呈現鏡像對稱。 1. The photoionization (PI) and electron-impact ionization (EI) of small organic solvents in the ultraviolet and extreme ultraviolet (EUV) energy range are not only of fundamental interests, their underlying PI and EI chemistry are important for industrial applications, for example, in EUV lithography for IC manufacturing. The PI measurements were conducted at BL03A-HF-CGM, BL04B1-Seya and BL08A1-LSGM beamlines in the National Synchrotron Radiation Research Center, whereas the EI measurements were carried out by operating the QMS under an “RGA” (Residual Gas Analysis) mode using different electron-impact energy. The PI and EI spectra of 12 organic solvents, classified according to molecular structures, were examined in the threshold to 150 eV range with a quadrupole mass spectrometer (QMS) and the photoionization quantum yield (PIQY) were measured by photoionization mass spectrometry (PIMS). The electron-impact ionization branching ratios of this work are consistent with NIST’s and MSSJ’s at 70 eV, and the PIQY are also consistent with double ion chamber (DIC) method, whereas photoionization branching ratios of benzene, toluene and dimethyl ether (DME) are compared to literature values. We use the thermal chemical calculation to propose the tendency of PI and EI. By comparing the method of PI and EI, we find that the results of PI and EI are similar.2. Polycyclic aromatic hydrocarbons (PAHs) are considered the important medium in the space. Scientists used the PAHs’ infrared spectra to understand compositions in the interstellar, however, there were few vacuum ultraviolet (VUV) absorption spectra studies of PAHs. PAHs are common environmental pollutions and carcinogens, for sakes, United States Environmental Protection Agency had defined the carcinogenicity of 16 PAHs. We thus studied the VUV to VIS absorption and VIS fluorescence spectra of three PAHs in the solid and liquid phase. The measurements of VUV to VIS absorption spectra were separated in the two parts, VUV to UV and UV to VIS. The VUV to UV measurements were conducted at BL03A-HF-CGM beamline of the National Synchrotron Radiation Research Center, whereas the UV to VIS measurements were carried out by UV-VIS spectrometer (Hitachi, U-3010). The measurements of VIS fluorescence were operating by FluorologR-3 (Jobin Yvon Horiba, FL3-11). The peaks in the VUV to VIS absorption spectra of solid phase PAHs should form benzene-like 1A1g→1E1u transition, but the electron transition can split due to the reduction of molecular symmetry. The absorption and fluorescence spectra of liquid phase PAHs are consistence with literatures values, and the absorption position appears in the same energy region for both liquid and solid PAHs. We find that the excitation and emission spectra of most solid and liquid phase PAHs are not the mirror image.
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