國立高雄大學圖資館 |

語系: 繁體中文

說明(常見問題)

圖資館首頁

登入

回首頁

切換: 標籤 | MARC模式 | ISBD

Atomic layer deposition for semicond...

~

Seong Hwang, Cheol.

Atomic layer deposition for semiconductors

紀錄類型:	書目-電子資源 : Monograph/item
正題名/作者:	Atomic layer deposition for semiconductorsedited by Cheol Seong Hwang.
其他作者:	Seong Hwang, Cheol.
出版者:	Boston, MA :Springer US :2014.
面頁冊數:	x, 263 p. :ill., digital ;24 cm.
Contained By:	Springer eBooks
標題:	SemiconductorsSurfaces.
電子資源:	http://dx.doi.org/10.1007/978-1-4614-8054-9
ISBN:	9781461480549 (electronic bk.)

Atomic layer deposition for semiconductors
Atomic layer deposition for semiconductors[electronic resource] /edited by Cheol Seong Hwang. - Boston, MA :Springer US :2014. - x, 263 p. :ill., digital ;24 cm.

ISBN: 9781461480549 (electronic bk.)Subjects--Topical Terms:

229800
Semiconductors
--Surfaces.

Dewey Class. No.: 621.38152

Atomic layer deposition for semiconductors
LDR:00777nmm a2200241 a 4500 001 431880
003 DE-He213
005 20140505141740.0
006 m d
007 cr nn 008maaau
008 141114s2014 mau s 0 eng d
020 $a 9781461480549 (electronic bk.)
020 $a 9781461480532 (paper)
035 $a 978-1-4614-8054-9
040 $a GP $c GP
041 0 $a eng
082 0 4 $a 621.38152 $2 23
090 $a TK7871.85 $b .A881 2014
245 0 0 $a Atomic layer deposition for semiconductors $h [electronic resource] / $c edited by Cheol Seong Hwang.
260 $a Boston, MA : $b Springer US : $b Imprint: Springer, $c 2014.
300 $a x, 263 p. : $b ill., digital ; $c 24 cm.
650 0 $a Semiconductors $x Surfaces. $3 229800
650 1 4 $a Chemistry. $3 188628
650 2 4 $a Electrochemistry. $3 192934
650 2 4 $a Semiconductors. $3 182134
650 2 4 $a Memory Structures. $3 274440
650 2 4 $a Energy Technology. $3 338873
650 2 4 $a Electronics and Microelectronics, Instrumentation. $3 274412
700 1 $a Seong Hwang, Cheol. $3 675865
710 2 $a SpringerLink (Online service) $3 273601
773 0 $t Springer eBooks
856 4 0 $u http://dx.doi.org/10.1007/978-1-4614-8054-9
950 $a Chemistry and Materials Science (Springer-11644)

筆 0 讀者評論

館藏

1 筆 • 頁數 1 •
1

館藏流通類別

000000095417

電子館藏

1圖書

電子書

EB TK787185 A881 2014

一般使用(Normal)

在架

0

1 筆 • 頁數 1 •
1

多媒體

多媒體檔案
http://dx.doi.org/10.1007/978-1-4614-8054-9

評論

新增評論分享你的心得

Export

取書館別

變更密碼

登入