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DIY MEMSfabricating microelectromech...

Munro, Deborah.

DIY MEMSfabricating microelectromechanical systems in open use labs /

紀錄類型:	書目-電子資源 : Monograph/item
正題名/作者:	DIY MEMSby Deborah Munro.
其他題名:	fabricating microelectromechanical systems in open use labs /
作者:	Munro, Deborah.
出版者:	Cham :Springer International Publishing :2019.
面頁冊數:	xvi, 188 p. :ill. (some col.), digital ;24 cm.
Contained By:	Springer eBooks
標題:	Microelectromechanical systems.
電子資源:	https://doi.org/10.1007/978-3-030-33073-6
ISBN:	9783030330736$q(electronic bk.)

DIY MEMSfabricating microelectromechanical systems in open use labs /
Munro, Deborah.

DIY MEMSfabricating microelectromechanical systems in open use labs /[electronic resource] :by Deborah Munro. - Cham :Springer International Publishing :2019. - xvi, 188 p. :ill. (some col.), digital ;24 cm.

Introduction -- National Nanotechnology Coordinated Infrastructure (NNCI) -- Working in a Cleanroom -- MEMS Fabrication Process -- Equipment -- Tools and Supplies -- Designing for MEMS -- Soft Materials -- Imaging & Metrology -- Testing -- Transporting -- Regulatory Approval Pathways -- Locations of the Facilities -- Meet the Lab Directors -- Collaborating with a Facility -- International Options -- Intellectual Property -- Getting Project Assistance -- Costs -- Taking the First Steps.

This book describes the future of microscopically small medical devices and how to locate a lab to start conducting your own do-it-yourself microelectromechanical systems (MEMS) research in one of the many national, international, government, and other regional open use facilities, where you can quickly begin designing and fabricating devices for your applications. You will learn specific, tangible information on what MEMS are and how a device is fabricated, including what the main types of equipment are in these facilities. The book provides advice on working in a cleanroom, soft materials, collaboration, intellectual property and privacy issues, regulatory compliance, and how to navigate other issues that may arise. This book is primarily aimed at researchers and students who work at universities without MEMS facilities, and small companies who need access to MEMS resources. Introduces the MEMS fabrication processes and equipment Explains how to take the first steps - where to start and get initial advice and further assistance Includes a global list of MEMS facilities and resources with contact information.

ISBN: 9783030330736$q(electronic bk.)

Standard No.: 10.1007/978-3-030-33073-6doiSubjects--Topical Terms:

189825
Microelectromechanical systems.

LC Class. No.: TK7875 / .M86 2019

Dewey Class. No.: 621.3815

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505 0 $a Introduction -- National Nanotechnology Coordinated Infrastructure (NNCI) -- Working in a Cleanroom -- MEMS Fabrication Process -- Equipment -- Tools and Supplies -- Designing for MEMS -- Soft Materials -- Imaging & Metrology -- Testing -- Transporting -- Regulatory Approval Pathways -- Locations of the Facilities -- Meet the Lab Directors -- Collaborating with a Facility -- International Options -- Intellectual Property -- Getting Project Assistance -- Costs -- Taking the First Steps.
520 $a This book describes the future of microscopically small medical devices and how to locate a lab to start conducting your own do-it-yourself microelectromechanical systems (MEMS) research in one of the many national, international, government, and other regional open use facilities, where you can quickly begin designing and fabricating devices for your applications. You will learn specific, tangible information on what MEMS are and how a device is fabricated, including what the main types of equipment are in these facilities. The book provides advice on working in a cleanroom, soft materials, collaboration, intellectual property and privacy issues, regulatory compliance, and how to navigate other issues that may arise. This book is primarily aimed at researchers and students who work at universities without MEMS facilities, and small companies who need access to MEMS resources. Introduces the MEMS fabrication processes and equipment Explains how to take the first steps - where to start and get initial advice and further assistance Includes a global list of MEMS facilities and resources with contact information.
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